P4B High Performance 5-50,000 sccm Mass Flow Controllers
Model: P4B
P4B High Performance 5-50,000 sccm Mass Flow Controllers
Model: P4B
Overview
Overview
The P4B MFC is the next generation of multi-gas/multi-range mass flow controllers designed to meet critical gas flow control requirements for accuracy and speed of response while minimizing mass flow controller inventory requirements. P4B MFC multi-gas/multi-range capabilities are enabled with gas parameters already stored in memory which provide 1% of set point accuracy for the user selected gas. Configuring a gas and range is easily done through an Ethernet interface with no special software - only a PC and an internet browser are needed. The P4B MFC digital mass flow controller is an essential component for providing crucial process gas flow control in the production of semiconductors, LEDs and critical thin films, especially where short process steps are required. This performance extends over a broad range of process gases, whether "light" gases such as helium or "heavy" gases such as SF6
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5 - 50,000 sccm (N2 equivalent)
- Maximum Inlet Pressure150 psig (can not exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential5 - 5000 sccm (10 - 40 psid), 10000 - 20000 sccm (15 - 40 psid), 30000 - 50,000 sccm (25 - 40 psid), (N2 Full Scale with atmospheric pressure at the MFC outlet)
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Control Range2 - 100% of Full Scale
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, 5% Full Scale (per SEMI Guideline E17-0600)
- Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- Temperature Display0 - 100°C
- Temperature Accuracy±2°C
- Temperature Resolution0.1°C
- Display4 digits for value, 4 characters for unit
- Fitting TypeSwagelok® 4 VCR®, 1.125 in. surface mount (C-Seal, W-Seal), 1.5 in. W-Seal
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig inlet to atmosphere (range on mech.) To assure no flow-through, a separate positive shut-off valve is required.
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy, KM - 45, PTFE (Teflon)
- Weight<3 lbs. (1.4 kg)
- Power Requirements15 - 24 VDC @ 350 mA max
- Analog I/O Connector15-pin type "D" male, 9-pin type "D" male
- Flow Input Output Signal0 - 5 VDC, 4 - 20 mA
- DeviceNet Input Power Required11 - 25 VDC per DeviceNet specification (@ <3.5 watts)
- RS485 Input Power Required15 - 24 VDC @ 350 mA max
- DeviceNet Connector5-pin microconnnector (DeviceNet)
- DeviceNet Data Rate Switch Selection4 positions: 125, 250, 500K (default), PGM (programmable over the network)
- DeviceNet Communication RateData Rate (user selectable), 125 Kbps, 500 meters (1,640 ft.), 250 Kbps, 250 meters (820 ft.), 500 Kbps, 100 meters (328 ft.)
- DeviceNet Network SizeUp to 64 nodes
- RS485 Network SizeUp to 32 nodes
- RS485 Connector9-pin type "D" male
- RS485CommunicationRateData Rate (user selectable), 9.6 Kbps, 1200 meters (4,000 ft.), 19.2 Kbps, 1200 meters (4,000 ft.), 38.4 Kbps, 1200 meters (4,000 ft.)
- RS485 Data Rate Switch Selection3 positions: 9.6, 19.2, 38.4K (default)
- DeviceNet MAC ID Switches Addresses2 switches, 10 positions, 0,0 to 6,3 are hardware ID numbers, 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
- RS485 MAC ID Switches Addresses2 switches, 10 positions, 0,0 to 9,9. Available MAC ID's are 3,2 to 9,9.
- DeviceNet IndicatorsLED network status (green/red), LED module status (green/red)
- RS485 Network TopologyMaster/slave
- DeviceNet Network TopologyLinear (trunkline/dropline) power and signal on same network cable
- Temperature Readout Units°C
- RS485 IndicatorsLED network status (green/red), LED module status (green/red)er (1 to 31))
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5 - 50,000 sccm (N2 equivalent)
- Maximum Inlet Pressure150 psig (can not exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential5 - 5000 sccm (10 - 40 psid), 10000 - 20000 sccm (15 - 40 psid), 30000 - 50,000 sccm (25 - 40 psid), (N2 Full Scale with atmospheric pressure at the MFC outlet)
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Control Range2 - 100% of Full Scale
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, 5% Full Scale (per SEMI Guideline E17-0600)
- Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- Temperature Display0 - 100°C
- Temperature Accuracy±2°C
- Temperature Resolution0.1°C
- Display4 digits for value, 4 characters for unit
- Fitting TypeSwagelok® 4 VCR®, 1.125 in. surface mount (C-Seal, W-Seal), 1.5 in. W-Seal
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig inlet to atmosphere (range on mech.) To assure no flow-through, a separate positive shut-off valve is required.
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy, KM - 45, PTFE (Teflon)
- Weight<3 lbs. (1.4 kg)
- Power Requirements15 - 24 VDC @ 350 mA max
- Analog I/O Connector15-pin type "D" male, 9-pin type "D" male
- Flow Input Output Signal0 - 5 VDC, 4 - 20 mA
- DeviceNet Input Power Required11 - 25 VDC per DeviceNet specification (@ <3.5 watts)
- RS485 Input Power Required15 - 24 VDC @ 350 mA max
- DeviceNet Connector5-pin microconnnector (DeviceNet)
- DeviceNet Data Rate Switch Selection4 positions: 125, 250, 500K (default), PGM (programmable over the network)
- DeviceNet Communication RateData Rate (user selectable), 125 Kbps, 500 meters (1,640 ft.), 250 Kbps, 250 meters (820 ft.), 500 Kbps, 100 meters (328 ft.)
- DeviceNet Network SizeUp to 64 nodes
- RS485 Network SizeUp to 32 nodes
- RS485 Connector9-pin type "D" male
- RS485CommunicationRateData Rate (user selectable), 9.6 Kbps, 1200 meters (4,000 ft.), 19.2 Kbps, 1200 meters (4,000 ft.), 38.4 Kbps, 1200 meters (4,000 ft.)
- RS485 Data Rate Switch Selection3 positions: 9.6, 19.2, 38.4K (default)
- DeviceNet MAC ID Switches Addresses2 switches, 10 positions, 0,0 to 6,3 are hardware ID numbers, 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
- RS485 MAC ID Switches Addresses2 switches, 10 positions, 0,0 to 9,9. Available MAC ID's are 3,2 to 9,9.
- DeviceNet IndicatorsLED network status (green/red), LED module status (green/red)
- RS485 Network TopologyMaster/slave
- DeviceNet Network TopologyLinear (trunkline/dropline) power and signal on same network cable
- Temperature Readout Units°C
- RS485 IndicatorsLED network status (green/red), LED module status (green/red)er (1 to 31))
Resources & Downloads
Drawings & CADs
P4B Mass Flow Controller/Meter Dimensional Drawings(134.7 kB, PDF)