Achieve accurate flow measurements with any gas using gas correction factors for thermal mass flow controllers (MFCs). These factors adjust for unique gas properties, ensuring your equipment delivers reliable readings every time.
The following table lists theoretical gas correction factors for various gases with respect to Nitrogen for thermal-based mass flow controllers. Please note that a non-linearity may exist between a Nitrogen calibration and the actual flow of process gases.
Gas | Symbol | Specific Heat, CP cal/g°C | Density g/l @ 0°C | Conversion Factor |
---|---|---|---|---|
Air | - - - | 0.240 | 1.293 | 1.00 |
Ammonia | NH3 | 0.492 | 0.760 | 0.73 |
Argon | Ar | 0.1244 | 1.782 | 1.39 |
Arsine | AsH3 | 0.1167 | 3.478 | 0.67 |
Boron Trichloride | BCl3 | 0.1279 | 5.227 | 0.41 |
Bromine | Br2 | 0.0539 | 7.130 | 0.81 |
Carbon Dioxide | CO2 | 0.2016 | 1.964 | 0.70* |
Carbon Monoxide | CO | 0.2488 | 1.250 | 1.00 |
Carbon Tetrachloride | CCl4 | 0.1655 | 6.86 | 0.31 |
Carbon Tetraflouride (Freon - 14) | CF4 | 0.1654 | 3.926 | 0.42 |
Chlorine | Cl2 | 0.1144 | 3.163 | 0.86 |
Chlorodifluoromethane (Freon - 22) | CHClF2 | 0.1544 | 3.858 | 0.46 |
Chloropentafluoroethane (Freon - 115) | C2ClF5 | 0.164 | 6.892 | 0.24 |
Chlorotrifluoromethane (Freon - 13) | CClF3 | 0.153 | 4.660 | 0.38 |
Cyanogen | C2N2 | 0.2613 | 2.322 | 0.61 |
Deuterium | D2 | 1.722 | 0.1799 | 1.00 |
Diborane | B2H6 | 0.508 | 1.235 | 0.44 |
Dibromodifluoromethane | CBr2F2 | 0.15 | 9.362 | 0.19 |
Dichlorodifluoromethane (Freon - 12) | CCl2F2 | 0.1432 | 5.395 | 0.35 |
Dichlorofluoromethane (Freon - 21) | CHCl2F | 0.140 | 4.592 | 0.42 |
Dichloromethysilane | (CH3)2SiCl2 | 0.1882 | 5.758 | 0.25 |
Dichlorosilane | SiH2Cl2 | 0.150 | 4.506 | 0.40 |
1,2-Dichlorotetrafluoroethane (Freon - 114) | C2Cl2F4 | 0.160 | 7.626 | 0.22 |
1,1-Difluoroethylene (Freon - 1132A) | C2H2F2 | 0.224 | 2.857 | 0.43 |
2,2-Dimethylpropane | C5H12 | 0.3914 | 3.219 | 0.22 |
Ethane | C2H6 | 0.4097 | 1.342 | 0.50 |
Fluorine | F2 | 0.1873 | 1.695 | 0.98 |
Fluoroform (Freon - 23) | CHF3 | 0.176 | 3.127 | 0.50 |
Freon - 11 | CCl3F | 0.1357 | 6.129 | 0.33 |
Freon - 12 | CCl2F2 | 0.1432 | 5.395 | 0.35 |
Freon - 13 | CClF3 | 0.153 | 4.660 | 0.38 |
Freon - 13 B1 | CBrF3 | 0.1113 | 6.644 | 0.37 |
Freon - 14 | CF4 | 0.1654 | 3.926 | 0.42 |
Freon - 21 | CHCl2F | 0.140 | 4.592 | 0.42 |
Freon - 22 | CHClF2 | 0.1544 | 3.858 | 0.46 |
Freon - 23 | CHF3 | 0.176 | 3.127 | 0.50 |
Freon - 113 | C2Cl2F3 | 0.161 | 8.360 | 0.20 |
Freon - 114 | C2Cl2F4 | 0.160 | 7.626 | 0.22 |
Freon - 115 | C2ClF5 | 0.164 | 6.892 | 0.24 |
Freon - 116 | C2F6 | 0.1843 | 6.157 | 0.24 |
Freon - C318 | C4F8 | 0.1866 | 8.93 | 0.164 |
Freon - 1132A | C2H2F2 | 0.224 | 2.857 | 0.43 |
Helium | He | 1.241 | 0.1786 | 1.45 |
Hexafluoroethane (Freon - 116) | C2F6 | 0.1843 | 6.157 | 0.24 |
Hydrogen | H2 | 3.419 | 0.0899 | 1.01 |
Hydrogen Bromide | HBr | 0.0861 | 3.610 | 1.00 |
Hydrogen Chloride | HCl | 0.1912 | 1.627 | 1.00 |
Hydrogen Fluoride | HF | 0.3479 | 0.893 | 1.00 |
Isobutylene | C4H8 | 0.3701 | 2.503 | 0.29 |
Krypton | Kr | 0.0593 | 3.739 | 1.543 |
Methane | CH4 | 0.5328 | 0.715 | 0.72 |
Methyl Fluoride | CH3F | 0.3221 | 1.518 | 0.56 |
Molybdenum Hexafluoride | MoF6 | 0.1373 | 9.366 | 0.21 |
Neon | Ne | 0.246 | 0.900 | 1.46 |
Nitric Oxide | NO | 0.2328 | 1.339 | 0.99 |
Nitrogen | N2 | 0.2485 | 1.250 | 1.00 |
Nitrogen Dioxide | NO2 | 0.1933 | 2.052 | ** |
Nitrogen Trifluoride | NF3 | 0.1797 | 3.168 | 0.48 |
Nitrous Oxide | N2O | 0.2088 | 1.964 | 0.71 |
Octafluorocyclobutane (Freon - C318) | C4F8 | 0.1866 | 8.93 | 0.164 |
Oxygen | O2 | 0.2193 | 1.427 | 0.993 |
Pentane | C5H12 | 0.398 | 3.219 | 0.21 |
Perfluoropropane | C3F8 | 0.194 | 8.388 | 0.17 |
Phosgene | COCl2 | 0.1394 | 4.418 | 0.44 |
Phosphine | PH3 | 0.2374 | 1.517 | 0.76 |
Propane | C3H8 | 0.3885 | 1.967 | 0.36 |
Propylene | C3H6 | 0.3541 | 1.877 | 0.41 |
Silane | SiH4 | 0.3189 | 1.433 | 0.60 |
Silicon Tetrachloride | SiCl4 | 0.1270 | 7.580 | 0.28 |
Silicon Tetrafluoride | SiF4 | 0.1691 | 4.643 | 0.35 |
Sulfur Dioxide | SO2 | 0.1488 | 2.858 | 0.69 |
Sulfur Hexafluoride | SF6 | 0.1592 | 6.516 | 0.26 |
Trichlorofluoromethane (Freon - 11) | CCl3F | 0.1357 | 6.129 | 0.33 |
Trichlorosilane | SiHCl3 | 0.1380 | 6.043 | 0.33 |
1,1,2-Trichloro - 1,2,2-Trifluoroethane (Freon - 113) |
CCl2FCClF2 or C2Cl3F3 | 0.161 | 8.360 | 0.20 |
Tungsten Hexafluoride | WF6 | 0.0810 | 13.28 | 0.25 |
xenon | xe | 0.0378 | 5.858 | 1.32 |
** Consult MKS Instruments Applications
Note: Standard pressure is defined as 760 mmHg (14.7 psia). Standard temperature is defined as 0°C.
MKS Mass Flow Controllers & Meters
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