Configuration Options

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Description
P4B-MFM Mass Flow Meter, Multi-gas, Multi-range, 5 sccm to 50 slm

Specifications

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    5-50000 sccm
  • Measurement Range
    0.1-100% of Full Scale (range on mech.)
  • Maximum Inlet Pressure
    500 psig
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for 20-100% Full Scale
    ±0.2% of Full Scale for 2-20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale./°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    <30 min (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • Storage Temperature
    -20° to 80°C (-4° to 149° F)
  • Temperature Display
    0-100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • Fitting Type
    Compatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal
  • External Leak Integrity
    <1 x 10-10
  • Wetted Materials
    316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
  • Surface Finish
    10μ inch average Ra
  • Weight
    <2.5 lbs (1.1kg)
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ 200mA max
  • Analog I/O Connector
    15-pin Type “D” Male, 9 pin Type “D” Male
  • Flow Input Output Signal
    0 to 5 VDC
  • DeviceNet Connector
    5 pin microconnnector (DeviceNet)
  • RS485 Connector
    9 pin Type “D” Male

Features

Communications Options

Digital I/O DeviceNet™ RS485
Input Power Required +11 to +25 VDC per DeviceNet specification (@ <2.0 watts) +15 to +24 VDC @ 200mA max
Connector 5 pin microconnnector (DeviceNet) 9 pin Type "D" Male
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) 3 positions: 9.6, 19.2, 38.4K (Default)
Data Rate/Network Length Data rate (user selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet)		 Data rate (user selectable)
9.6 Kbps, 1200 meters (4,000 feet)
19.2 Kbps, 1200 meters (4,000 feet)
38.4 Kbps, 1200 meters (4,000 feet)
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
(6,4 to 6,9 are unused and, if selected will default to hardware ID number 6.3)		 2 switches, 10 positions; 0,0 to 9,9.
Available MAC ID's are 3,2 to 9,9.
Network Size Up to 64 nodes Up to 32 nodes
Network Topology Linear (trunkline/dropline) power and signal on same network cable Master/slave
Visual Indicators LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)		 LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)
Compliance CE CE

Multi-gas/Multi-range Capable

The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.

Resources

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