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  3. Mass Flow Controllers

Mass Flow Controllers

Enabling Productivity Through Flow Control Innovation

MKS Instruments offers a comprehensive portfolio of high-performance Mass Flow Controllers (MFCs) designed to deliver exceptional precision and reliability in regulating gas flow rates. These innovative instruments are ideal for a wide range of applications in various industries, including semiconductor manufacturing, chemical processing, and research laboratories.

MKS MFCs utilize advanced technologies to ensure accurate and repeatable gas flow measurement and control. They are available in a variety of configurations to accommodate diverse flow rate requirements and gas compatibilities. Whether you require precise control of air, nitrogen, hydrogen, or other specialty gases, MKS has the MFC technology to suit your specific needs.

Mass Flow Controllers

G-Series Fast and Repeatable Mass Flow Controllers

p4b high performance 5-50,000 sccm mass flow controller

P-Series High Performance Mass Flow Controllers

C-Series Compact, Ultrafast Mass Flow Controllers

ie500a ip66-rated, elastomer-sealed 250-500 slm mass flow controller

High Flow Mass Flow Controllers

ie1000a ip66-rated, elastomer-sealed 500-1000 slm mass flow controller

IP66 Rated Mass Flow Controllers

179c mass flow meter & 1179c mass flow controller, 10-20,000 sccm

Legacy Mass Flow Controllers