Configuration Options

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Description
p4b high performance 5-50,000 sccm mass flow controller P4B Mass Flow Controller, Multi-gas, Multi-range, 5 sccm to 50 slm

Specifications

  • Full Scale Flow Range
    5 - 50,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    5 to 5000 sccm (10 to 40 psid)
    10000 to 20000 sccm (15 to 40 psid)
    30000 to 50000 sccm (25 to 40 psid)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale
    ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    < 0.05% of Full Scale/°C
  • Span Temperature Coefficient
    < 0.08% of Reading/°C
  • Inlet Pressure Coefficient
    < 0.02% of Reading/psi
  • Typical Settling Time
    < 750 msec., typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • Temperature Display
    0 to 100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • External Leak Integrity
    < 1 x 10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    < 1.0% of Full Scale at 25 psig inlet to atmosphere
  • Wetted Materials
    316L stainless steel VAR,316 stainless steel, Elgiloy, KM-45
  • Valve Seat Material
    PTFE (Teflon)
  • Surface Finish
    10µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ 350mA max
  • Analog I/O Connector
    15-pin Type "D" Male, 9 pin Type "D" Male
  • Flow Input Output Signal
    0 to 5 VDC

Features

Communications Options

Digital I/O DeviceNet™ RS485
Input Power Required +11 to +25 VDC per DeviceNet specification (@ <2.0 watts) +15 to +24 VDC @ 200mA max
Connector 5 pin microconnnector (DeviceNet) 9 pin Type "D" Male
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) 3 positions: 9.6, 19.2, 38.4K (Default)
Data Rate/Network Length Data rate (user selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet)		 Data rate (user selectable)
9.6 Kbps, 1200 meters (4,000 feet)
19.2 Kbps, 1200 meters (4,000 feet)
38.4 Kbps, 1200 meters (4,000 feet)
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
(6,4 to 6,9 are unused and, if selected will default to hardware ID number 6.3)		 2 switches, 10 positions; 0,0 to 9,9.
Available MAC ID's are 3,2 to 9,9.
Network Size Up to 64 nodes Up to 32 nodes
Network Topology Linear (trunkline/dropline) power and signal on same network cable Master/slave
Visual Indicators LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)		 LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)
Compliance CE CE

Short Process Steps Performance

The performance capabilities of the P4B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6.

Multi-Gas / Multi-Range Capability

Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating.

MKS P Series Mass Flow Controllers

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.

Resources

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