MKS Service Solutions
Minimizing Cost.
Maximizing Equipment Longevity.
The MKS Service Solutions Portfolio focuses on key customer metrics which includes:
- Total Cost of Ownership
- Uptime
- Service Cycle Times
- Extending Equipment Lifetime
The various solutions available allow customers to tailor their service experience to meet their individual needs. Over 500 service professionals support our 13 service centers spread across North America, Europe, and Asia Pacific. The vast service infrastructure provides global, regional, and local service support to meet our customers where they operate.

Each Service Solution provides customers access to MKS certified repairs, original design engineers, complete product testing with original specifications which can be found at no other repair center in the world. Our services testing often leads to predicting potential future issues which leads to equipment longevity.
MKS Service ePortal
MKS’ web-based Service ePortal provides you with RMA service information at your fingertips, enabling you to get your work done more efficiently. Just log in and quickly and easily enter your RMA request, view unit status and shipment information, search by serial number, and see all your service requests at a glance. Check out the service ePortal functionality here.
Resources
RMA Form Complete this form when making a return.
Health & Safety Form Complete and include this form when sending equipment...
How to Order Services Instructions and options...
MKS Service Programs
Onsite Support Agreements
An initial comprehensive analysis identifies key value creation opportunities which may include:
- Service Inventory Solutions
- Conversion Solutions
- Dedicated Field Service Support
Each tailored agreement is designed to meet individual customer service strategy and needs.
Extended Warranties
Providing customers with the ability to fix annual maintenance budgets and tailor equipment coverage periods.
- Predictable Financial Planning: Eliminate the volatility of "break-fix" cycles by converting variable repair costs into a fixed annual line item, ensuring long-term budgetary certainty.
- Minimized Operational Risk: Protect against the high costs of unplanned component failures with comprehensive coverage that includes parts, labor, and priority response times.
- Customized Protection Tiers: Scale your coverage to match specific asset criticality, from comprehensive "bumper-to-bumper" plans for high-utilization tools to basic hardware support for secondary systems.
Please contact sales for more information.
Fixed-Price Repair (FPR)
A simple approach to service repair which allow customers to:
- Tailor repair level to fit their service demands
- Receive quality MKS factory approved parts
- Proactively refurbish equipment to extend equipment life
Calibration
MKS-Certified test stands, with NIST Traceable standards, calibrate equipment to meet MKS factory specifications, maintaining high equipment performance.
- Verified Accuracy and Compliance: Ensure all instruments remain within strict operational tolerances using NIST-traceable standards, providing the necessary documentation for rigorous industry audits and quality certifications.
- Optimal Process Repeatability: Minimize "tool-to-tool" variability by returning equipment to original factory specifications, ensuring consistent performance across the entire production floor.
- Proactive Performance Safeguards: Identify and correct sensor drift or minor hardware deviations before they lead to process excursions, reducing the risk of costly scrap or unplanned downtime.
Please contact sales for more information.
Trade-In
MKS offers Trade-In programs for many of our products ensuring customers have newer technology to support their future process needs.
- Cost-Effective Scalability: Leverage the residual value of legacy equipment through generous trade-in credits, significantly lowering the capital expenditure required to transition to state-of-the-art systems.
- Sustainability and Responsible Disposal: Simplify asset management with eco-friendly recycling and refurbishing programs that ensure older hardware is handled according to global environmental standards.
- Future-Proofed Operations: Eliminate the bottlenecks caused by aging components by upgrading to hardware specifically engineered to handle the tighter tolerances and increased complexities of next-generation manufacturing processes.
Please contact sales for more information.
Repair Like New
The Repair Like New (RLN) program restores units to like new condition by:
- Repairing and replacing early failure assemblies with MKS factory approved parts
- Providing unit with full 12-month warranty
- Testing and calibrating to MKS factory specifications
Conversion Solutions
MKS offers Continuous Improvement Solutions and Upgrades to allow customers to access the latest technology advancements.
- Extended Asset Lifecycle: Modernize existing hardware with the latest sub-system upgrades to delay equipment obsolescence and maximize return on investment.
- Enhanced Process Throughput: Integrate advanced technology features that optimize system performance, reducing cycle times and increasing overall manufacturing yield.
- Seamless Technology Migration: Utilize field-proven upgrade kits designed for minimal downtime, allowing a swift transition to next-generation capabilities without the cost of a full system replacement.
Field Replaceable Units
MKS factory approved parts support increased uptime by providing in-field maintenance and consumable parts replacement.
- Rapid Mean Time to Repair (MTTR): Simplify complex repairs with modular components designed for quick installation, allowing onsite technicians to restore system functionality in minutes rather than hours.
- Guaranteed Compatibility and Performance: Utilize only MKS factory-approved parts that are engineered to exact design tolerances, eliminating the performance degradation or safety risks associated with third-party alternatives.
- Optimized Spares Strategy: Streamline inventory management by stocking high-impact, swappable modules that cover the most critical failure points, ensuring immediate availability when every second of downtime counts.
Please contact your local sales team for more information.
Service Inventory Solutions
Designed to provide supply chain resiliency, MKS performs an assessment to identify high use parts to create a strategic stocking program at either of the following locations:
- On-site at the Customer’s facility
- MKS Logistics Hubs
- 3rd Party Logistics Warehouse
This solution offers reduced inventory carrying costs, simplified order processing and streamlined delivery.
Training
MKS offers specific product training to support:
- General operation and maintenance
- Advanced service training
Tailored training programs help customers improve equipment maintenance cycles, increasing uptime. Please contact sales for more information on available product trainings.
Need help?
Contact MKS by sending us an email