MKS Service Solutions

Minimizing Cost.

Maximizing Equipment Longevity.

The MKS Service Solutions Portfolio focuses on key customer metrics which includes:

  • Total Cost of Ownership
  • Uptime
  • Service Cycle Times
  • Extending Equipment Lifetime

The various solutions available allow customers to tailor their service experience to meet their individual needs. Over 500 service professionals support our 13 service centers spread across North America, Europe, and Asia Pacific. The vast service infrastructure provides global, regional, and local service support to meet our customers where they operate.

Each Service Solution provides customers access to MKS certified repairs, original design engineers, complete product testing with original specifications which can be found at no other repair center in the world. Our services testing often leads to predicting potential future issues which leads to equipment longevity.


RMA Form Complete this form when making a return.
Health & Safety Form Complete and include this form when sending equipment to us for calibration and/or repair.
How to Order Services Instructions and options for ordering MKS repair and calibration services.

MKS Service Programs

Onsite Support Agreements

An initial comprehensive analysis identifies key value creation opportunities which may include:

  • Service Inventory Solutions
  • Conversion Solutions
  • Dedicated Field Service Support

Each tailored agreement is designed to meet individual customer service strategy and needs.

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Extended Warranties

Providing customers with the ability to:

  • Fix annual maintenance budgets
  • Tailor equipment coverage periods

Please contact sales for more information.

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Fixed-Price Repair (FPR)

A simple approach to service repair which allow customers to:

  • Tailor repair level to fit their service demands
  • Receive quality MKS factory approved parts
  • Proactively refurbish equipment to extend equipment life

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MKS-Certified test stands, with NIST Traceable standards, calibrate equipment to meet MKS factory specifications, maintaining high equipment performance.


MKS understands customer technology requirements change over time.

MKS offers Trade-In programs for many of our products ensuring customers have newer technology to support their future process needs.

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Repair Like New

The Repair Like New (RLN) program restores units to like new condition by:

  • Repairing and replacing early failure assemblies with MKS factory approved parts
  • Providing unit with full 12-month warranty
  • Testing and calibrating to MKS factory specifications

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Conversion Solutions

MKS offers Continuous Improvement Solutions and Upgrades to allow customers to access the latest technology advancements.

Field Replaceable Units

MKS factory approved parts support increased uptime by providing:

  • Infield maintenance
  • Consumable parts replacement

Please contact your local sales team for more information or visit our e-commerce site here.

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Service Inventory Solutions

Designed to provide supply chain resiliency, MKS performs an assessment to identify high use parts to create a strategic stocking program at either of the following locations:

  • On-site at the Customer’s facility
  • MKS Logistics Hubs
  • 3rd Party Logistics Warehouse

This solution offers reduced inventory carrying costs, simplified order processing and streamlined delivery.

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MKS offers specific product training to support:

  • General operation and maintenance
  • Advanced service training

Tailored training programs help customers improve equipment maintenance cycles, increasing uptime. Please contact sales for more information on available product trainings.

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Need help?

Contact MKS by sending us an email