Compare Description Drawings, CAD & Specs Availability Price
Base Vacuum Gauge Controller, RS232 and RS485, Series 946, US Region
7 Weeks
7 Weeks

Configuration Options

946 Vacuum System Controller, Power Source, Readout, 6-Channel


  • Measurement Range
    10,000 Torr to 10-11 Torr (Dependent upon sensor type)
  • Display
    320x240 color QVGA TFT LCD with back lighting
  • Front Panel Controls
    Power on-off switch, setup and operational commands can be accessed via the keypad
  • Units
    Pressure: Torr, mbar, Pascal
    Flow: sccm and slm
  • Power Requirements
    100-240 VAC 50/60 Hz 150 W maximum
  • Analog Output
    Buffered, log linear and linear output for each channel and log linear for combined channels
  • Set Point Contact Rating
    2 amps @ 30 VAC
  • Set Point Configuration
    Twelve pressure dependent SPST set point relays
  • Operating Temperature
    5-40°C (41-104°F)
  • Storage Temperature
    10-55°C (50-131°F)
  • Mounting
    1/2 rack, 2U High, 13 inches deep
  • Weight
    8 lbs. (3.6 kg)
  • Compliance


Highly Flexible Vacuum System Controller

This highly flexible vacuum system controller supports a wide range of sensor technologies, including Baratron® capacitance manometers, cold cathode, hot cathode, standard Pirani and convection Pirani sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. In addition, the Series 946 Controller will also monitor and control MKS mass flow controller Types I, G, or P Series and legacy mass flow controllers along with MKS pressure control valves.

Internal Communication Between Sensors

Internal communication between sensor cards, provides a combined output across as many as three sensors for one continuous pressure reading. The internal control feature provides automatic control of ion gauges, protecting them from accidental power on at high pressures. The Series 946 also provides set point relays for external signals and control and may be configured to provide upstream or downstream system pressure control. Serial communications and individual analog outputs are also furnished as standard features.

Twelve Programmable Set Point Relays

The Series 946 provides twelve user programmable set point relays with adjustable hysteresis, four assigned to each of the three card slots. The analog outputs can be programmed as linearly scaled, logarithmically scaled, or as set points, and can be assigned to any of the six sensor channels.

Digital PID Pressure control

With the installation of a valve drive card, fast and accurate closed-loop digital PID pressure control is achieved with an MKS gas proportioning valve or exhaust throttle valve. Additionally, upstream pressure control can be accomplished with a mass flow controller and an MFC card operating in ratio mode.

Compatible Pressure Transducers

  • Baratron® capacitance manometers providing 0 to 10 VDC output
  • MKS Pirani sensors
  • MKS convection Pirani sensors
  • Series 423, 431 and 422 cold cathode ionization sensors
  • Nude & MIG type hot cathode ionization sensors

Compatible Mass Flow Controllers

  • Mass-Flo® Mass Flow Controllers
  • G, I, & P-Series Mass Flow Controllers
  • Legacy Mass Flow Controllers
  • Any MFC requiring ±15 VDC or +15 to +24 VDC, 0-5 VDC set point and standard 15 pin or 9 pin D-sub cable connection

Compatible Pressure Control Valves

  • 248A, 148J, 154A solenoid control valves
  • 153D and T3Bi exhaust throttle valves

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