P9B Pressure-insensitive 5-50,000 sccm Mass Flow Controllers
Model: P9B
P9B Pressure-insensitive 5-50,000 sccm Mass Flow Controllers
Model: P9B
Overview
Overview
The P9B pressure insensitive, multi-gas/multi-range mass flow controller features sub-750 millisecond control times and accuracy to within 1% of set point over a broad range of process gases, from "light" gases such as helium to "heavy" gases like SF6. P9B is a true multi-range/multi-gas MFC, minimizing MFC inventory requirements. Using the P9B multi-gas/multi-range capability is made simple with embedded software and standard Ethernet interface that requires only a standard web browser and a PC. Critical gas parameters for most of the gases in use today by the semiconductor industry are already stored on the device - configuring is simply a matter of selecting the gas and specifying the range. The user interface also performs device monitoring & diagnostics during operation. The P9B MFC is designed for critical process gas flow control where short process steps are required.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5 - 50,000 sccm (N2 equivalent)
- Maximum Inlet Pressure150 psig (cannot exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential10 - 5000 sccm: 10 - 40 psid, 10000 - 20000 sccm: 15 - 40 psid, 30000 - 50,000 sccm: 25 - 40 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Control Range2 - 100% of Full Scale
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, 5% Full Scale (per SEMI Guideline E17-0600)
- Warm-up Time<30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- Temperature Display0 - 100°C
- Temperature Accuracy±2°C
- Temperature Resolution0.1°C
- Display4 digits for value, 4 characters for unit
- Pressure Readout Unitspsia, kPA
- Pressure Accuracy1% Full Scale
- Pressure Resolution0.1 psia
- Fitting TypeSwagelok® 4 VCR®, 1.125 in. surface mount (C-Seal, W-Seal), 1.5 in. W-Seal
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig inlet to atmosphere (range on mech.) To assure no flow-through, a separate positive shut-off valve is required.
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy, KM - 45, PTFE (Teflon)
- Surface Finish10 µ inch average Ra
- Weight<3 lbs. (1.4 kg)
- DeviceNet Data Rate Switch Selection4 positions: 125, 250, 500K (default), PGM (programmable over the network)
- DeviceNet Communication RateData Rate (user selectable), 125 Kbps, 500 meters (1,640 ft.), 250 Kbps, 250 meters (820 ft.), 500 Kbps, 100 meters (328 ft.)
- DeviceNet Network SizeUp to 64 nodes
- RS485 Network SizeUp to 32 nodes
- Temperature Readout Units°C
- Attitude Insensitivity0.25% of Full Scale for indicated zero, span and actual span
- Pressure Transient±5% of set point from 20 - 100% of Full Scale when subject to a 2 psi inlet pressure transient (Inlet/Outlet Pressure Sensitivity)
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5 - 50,000 sccm (N2 equivalent)
- Maximum Inlet Pressure150 psig (cannot exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential10 - 5000 sccm: 10 - 40 psid, 10000 - 20000 sccm: 15 - 40 psid, 30000 - 50,000 sccm: 25 - 40 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Control Range2 - 100% of Full Scale
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, 5% Full Scale (per SEMI Guideline E17-0600)
- Warm-up Time<30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- Temperature Display0 - 100°C
- Temperature Accuracy±2°C
- Temperature Resolution0.1°C
- Display4 digits for value, 4 characters for unit
- Pressure Readout Unitspsia, kPA
- Pressure Accuracy1% Full Scale
- Pressure Resolution0.1 psia
- Fitting TypeSwagelok® 4 VCR®, 1.125 in. surface mount (C-Seal, W-Seal), 1.5 in. W-Seal
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 25 psig inlet to atmosphere (range on mech.) To assure no flow-through, a separate positive shut-off valve is required.
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy, KM - 45, PTFE (Teflon)
- Surface Finish10 µ inch average Ra
- Weight<3 lbs. (1.4 kg)
- DeviceNet Data Rate Switch Selection4 positions: 125, 250, 500K (default), PGM (programmable over the network)
- DeviceNet Communication RateData Rate (user selectable), 125 Kbps, 500 meters (1,640 ft.), 250 Kbps, 250 meters (820 ft.), 500 Kbps, 100 meters (328 ft.)
- DeviceNet Network SizeUp to 64 nodes
- RS485 Network SizeUp to 32 nodes
- Temperature Readout Units°C
- Attitude Insensitivity0.25% of Full Scale for indicated zero, span and actual span
- Pressure Transient±5% of set point from 20 - 100% of Full Scale when subject to a 2 psi inlet pressure transient (Inlet/Outlet Pressure Sensitivity)