Configuration Options

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Description
p9b pressure-insensitive 5-50,000 sccm mass flow controller P9B Mass Flow Controller, Pressure-insensitive, Multi-gas, Multi-range, 5 sccm to 50 slm

Specifications

  • Full Scale Flow Range
    5-50,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10-5000 sccm; 10-40 psid
    10000-20000 sccm; 15-40 psid
    10000-20000 sccm; 15-40 psid
    (N2 Full Scale with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20-100% Full Scale
    ±0.2% of Full Scale for 2-20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    < 0.05% of Full Scale/°C
  • Span Temperature Coefficient
    < 0.08% of Reading/°C
  • Inlet Pressure Coefficient
    < 0.02% of Reading/psi
  • Typical Settling Time
    < 750 msec., typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • Temperature Display
    0 to 100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • Pressure Display
    0 to 100 psia
  • Pressure Readout Units
    psia, kPA
  • Pressure Accuracy
    1% Full Scale
  • Pressure Resolution
    0.1 psia
  • External Leak Integrity
    < 1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    < 1.0% of Full Scale at 25 psig inlet to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy, KM-45
  • Valve Seat Material
    PTFE (Teflon)
  • Surface Finish
    10µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE
  • Attitude Insensitivity
    0.25% of Full Scale for indicated zero, span and actual span
  • Pressure Transient
    ±5% of set point from 20 to 100% of Full Scale when subject to a 2 psi inlet pressure transient

Features

MKS P Series Mass Flow Controllers

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.

Communications Options

Digital I/O DeviceNet™ EtherCAT®
Input Power Required +11 to +25 VDC per DeviceNet specification (@ <2.0 watts) +24 VDC (<5 watts)
Connector 5 pin microconnnector (DeviceNet) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) No switch
Data Rate/Network Length Data rate (user selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet)		 100 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
(6,4 to 6,9 are unused and, if selected will default to hardware ID number 6.3)		 3 switches, 16 positions
Network Size Up to 64 nodes Up to 4095 nodes
Network Topology Linear (trunkline/dropline) power and signal on same network cable n/a
Visual Indicators LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)		 LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)
Compliance CE CE

Short Process Steps Performance

The performance capabilities of the P9B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6. The P9B is a true multi-range/multi-gas MFC that enables the user to have confidence in this device’s capability and minimize MFC inventory requirements.

Multi-Gas / Multi-Range Capability

Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating.

Resources

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