P4B High Performance Mass Flow Meter, 5-50000 sccm
Model: P4B-MFM
P4B High Performance Mass Flow Meter, 5-50000 sccm
Model: P4B-MFM
Overview
Overview
The P4B is a 1.125 inch body, multi-gas/multi-range, metal sealed, Mass Flow Meter (MFM). The P4B digitally calibrated MFM is available with either analog or digital I/O (RS485, DeviceNet). The digital electronics utilize the latest MKS algorithms providing multi-gas/multi-range measurement capability. Included is a digital calibration that yields 1% of Reading accuracy on the calibration gas.
Technical Specs
- TypeMass Flow Meter
- Full Scale Flow Range5-50000 sccm
- Measurement Range0.1-100% of Full Scale (range on mech.)
- Maximum Inlet Pressure500 psig
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale - Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale./°C
- Span Temperature Coefficient<0.08% of Reading./°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10-50°C
- Storage Humidity0-95% relative humidity, non-condensing
- Storage Temperature-20° to 80°C (-4° to 149° F)
- Temperature Display0-100°C
- Temperature Accuracy±2°C
- Temperature Resolution0.1°C
- Display4 digits for value, 4 characters for unit
- Fitting TypeCompatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal
- External Leak Integrity<1 x 10-10
- Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
- Surface Finish10μ inch average Ra
- Weight<2.5 lbs (1.1kg)
- ComplianceCE
- Power Requirements+15 to +24 VDC @ 200mA max
- Analog I/O Connector15-pin Type “D” Male, 9 pin Type “D” Male
- Flow Input Output Signal0 to 5 VDC
- DeviceNet Connector5 pin microconnnector (DeviceNet)
- RS485 Connector9 pin Type “D” Male
Technical Specs
- TypeMass Flow Meter
- Full Scale Flow Range5-50000 sccm
- Measurement Range0.1-100% of Full Scale (range on mech.)
- Maximum Inlet Pressure500 psig
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale - Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale./°C
- Span Temperature Coefficient<0.08% of Reading./°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10-50°C
- Storage Humidity0-95% relative humidity, non-condensing
- Storage Temperature-20° to 80°C (-4° to 149° F)
- Temperature Display0-100°C
- Temperature Accuracy±2°C
- Temperature Resolution0.1°C
- Display4 digits for value, 4 characters for unit
- Fitting TypeCompatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal
- External Leak Integrity<1 x 10-10
- Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
- Surface Finish10μ inch average Ra
- Weight<2.5 lbs (1.1kg)
- ComplianceCE
- Power Requirements+15 to +24 VDC @ 200mA max
- Analog I/O Connector15-pin Type “D” Male, 9 pin Type “D” Male
- Flow Input Output Signal0 to 5 VDC
- DeviceNet Connector5 pin microconnnector (DeviceNet)
- RS485 Connector9 pin Type “D” Male