Technical Specs

  • Type
    Mass Flow Controller
  • Full Scale Flow Range
    501-1000 slm
  • Fitting Type
    8 VCR male
  • Connector
    15 pin D (Analog 0-5 VDC I/O)
  • Maximum Inlet Pressure
    150 psig (cannot exceed pressure differential requirement across MFC)
  • Normal Operating Pressure Differential
    40-50 psid (dependent on fitting type with atmospheric pressure at the MFC outlet)
  • Burst Pressure
    1500 psig
  • Control Range
    2-100% of Full Scale (range on mech.)
  • Typical Accuracy
    ±1% of set point for >20-100% Full Scale, ±0.25% of Full Scale for 5 - 20% Full Scale
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.08% of Reading/psi
  • Typical Settling Time
    <3 sec, above 10% Full Scale @ 50 psi
  • Warm-up Time
    1 hour
  • Operating Temperature
    10 - 50°C
  • Storage Humidity
    0 - 95% Relative Humidity, non - condensing
  • Storage Temperature
    - 20 to 65°C ( - 4 to 149° F)
  • External Leak Integrity
    <1 x 10-9 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% Full Scale at 40 psia to vac (<500 mTorr) To assure no flow-through, a separate positive shut-off valve is required.
  • Seal Material
    EPDM
  • Wetted Materials
    316 stainless steel, Elgiloy, 430FR, PTFE (Standard), Viton® (Class VI), EPDM (Class VI)
  • Surface Finish
    16 µinch average Ra
  • Enclosure Rating
    IP66
  • Power Requirements
    15-24 VDC @ (<8 watts)
  • Flow Input Output Signal
    0-5 VDC, 4-20 mA
  • Weight
    <12.7 lbs. (5.8 kg)
  • Compliance
    CE

Technical Specs

  • Type
    Mass Flow Controller
  • Full Scale Flow Range
    501-1000 slm
  • Fitting Type
    8 VCR male
  • Connector
    15 pin D (Analog 0-5 VDC I/O)
  • Maximum Inlet Pressure
    150 psig (cannot exceed pressure differential requirement across MFC)
  • Normal Operating Pressure Differential
    40-50 psid (dependent on fitting type with atmospheric pressure at the MFC outlet)
  • Burst Pressure
    1500 psig
  • Control Range
    2-100% of Full Scale (range on mech.)
  • Typical Accuracy
    ±1% of set point for >20-100% Full Scale, ±0.25% of Full Scale for 5 - 20% Full Scale
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.08% of Reading/psi
  • Typical Settling Time
    <3 sec, above 10% Full Scale @ 50 psi
  • Warm-up Time
    1 hour
  • Operating Temperature
    10 - 50°C
  • Storage Humidity
    0 - 95% Relative Humidity, non - condensing
  • Storage Temperature
    - 20 to 65°C ( - 4 to 149° F)
  • External Leak Integrity
    <1 x 10-9 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% Full Scale at 40 psia to vac (<500 mTorr) To assure no flow-through, a separate positive shut-off valve is required.
  • Seal Material
    EPDM
  • Wetted Materials
    316 stainless steel, Elgiloy, 430FR, PTFE (Standard), Viton® (Class VI), EPDM (Class VI)
  • Surface Finish
    16 µinch average Ra
  • Enclosure Rating
    IP66
  • Power Requirements
    15-24 VDC @ (<8 watts)
  • Flow Input Output Signal
    0-5 VDC, 4-20 mA
  • Weight
    <12.7 lbs. (5.8 kg)
  • Compliance
    CE

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