IE1000A IP66 Rated Multi-gas, Multi-range Elastomer-sealed 500-1000 slm Mass Flow Meters

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Overview

IE1000A mass flow meters are elastomer-sealed, multi-gas/multi-range MFMs designed for use in harsh environments where resistance to liquid and dust ingress are essential. Applications include those where "hose down" may be required, such as industrial glass production where moisture and particulates are present. With its IP66 rated enclosure, the IE1000A meets the stringent requirements of these aggressive environments.
The IE1000A can be ranged from 500 slm to 1000 slm (N2 equivalent). The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers.

IP66 rated enclosure provides protection against water & dust in harsh environments
Tightly controlled flow accuracy of process gas improves process matching
Multi-gas/multi-range capability reduces MFM inventory

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Products

Configuration Options

The following options are available for IE1000A Mass Flow Meters
Ordering Code Example: IE1000A013106TBR320

Configuration Option	Option Code
IE1000A Mass Flow Meter	IE1000A
Gas (Per Semi Standard E52-0703)
Helium (He): 700-1400 slm	001
Argon (Ar): 450-900 slm	004
Hydrogen (H₂): 500-1000 slm	007
Nitrogen (N₂): 500-1000 slm	013
Other Gas Options	See Here
Flow Range Full Scale
1000 slm (1,000,000 sccm)	106
Fittings (compatible with)
12 mm Swagelok	L
0.5 in. tube compression	S
0.75 in. compression	Z
0.5 in. NPT female	M
0.75 in. NPT female	N
8 VCR male	T
8 VCO male	D
Connector
Profibus	4
PROFINET	9
15 pin D (Analog 0-5 VDC I/O)	B
15 pin D (4-20 mA I/O)	G
Seal Materials
Viton®	V
Buna	B
Neoprene®	N
EPDM	E
Device Type
Mass Flow Meter	3
Firmware
MKS will ship firmware revision current to date	20

* For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 10⁵ sccm or 250 slm; 105 is 1.0 x 10⁵ sccm or 100 slm

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	Description
	IE1000A-MFM Mass Flow Meter, IP66-rated, Elastomer-sealed, 500 - 1000 slm

Specifications

Type

Mass Flow Meter (MFM)
Full Scale Flow Range

500-1000 slm (N2 equivalent)
Measurement Range

0.2-100% Full Scale (range on mech.)
Fitting Type

Compatible with:
12 mm Swagelok
0.5 in. tube compression
0.75 in. compression
0.5 in. NPT female
0.75 in. NPT female
8 VCR male
8 VCO male
Connector

Profibus
PROFINET
15 pin D (Analog 0-5 VDC I/O)
15 pin D (4-20 mA I/O)
Maximum Inlet Pressure

150 psig
Burst Pressure

1500 psig
Typical Accuracy

±1% of Reading (with N2 calibration gas)
Repeatability

±0.5% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.05% of Full Scale/°C
Span Temperature Coefficient

<0.08% of Reading/°C
Inlet Pressure Coefficient

<0.03% of Reading/psi
Warm-up Time

1 hour

Operating Temperature

10-50°C
Storage Humidity

0 to 95% relative humidity, non-condensing
Storage Temperature

-20° to 65°C (-4° to 149° F)
External Leak Integrity

<1 x 10^-9
Seal Material

Viton®
Buna
Neoprene®
EPDM
Wetted Materials

316L S.S.
Surface Finish

20μ inch average Ra
Enclosure Rating

IP66
Power Requirements

15-24 VDC @ (<4 watts)
Flow Input Output Signal

Voltage (0-5 VDC)
Current (4-20 mA)
Analog I/O Connector

15 pin Type ‘’D’’ male
Weight

<10.8 lbs (4.8 kg)
Compliance

CE

Features

Communications

Digital I/O	Profibus®	PROFINET®
Input Power Required	+15 to +24 VDC (<2 watts)	+24 VDC (<3 watts)
Connector	9 pin Type D male (power) 9 pin Type D female (comm.)	2 x RJ-45 (comm.) male M8 male 5 pin (power)
Data Rate Switch/Selection	No switch Set data rate via Profibus	No switch
Comm. Rate(s)	9.6 Kbps to 12 Mbps	100 Mbps
MAC ID Switches/Addresses	2 switches, 10 positions	n/a
Network Size	Up to 99 nodes	n/a
Visual Indicators	LED Comm (green/red) LED Error (green/red)	LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red)
Compliance	CE	CE

Multi-gas/Multi-range Capable

The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.

Accessories

Description	Compatibility	Avail.	Price
CB147-12-10 Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	15 Weeks	$88
CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$94
CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	8 Weeks	$110