GE250A/GE300A Elastomer-sealed 100-300 slm Mass Flow Controllers
Model: GE300A
GE250A/GE300A Elastomer-sealed 100-300 slm Mass Flow Controllers
Model: GE300A
Overview
Overview
The GE300A Mass Flow Controller is a general purpose, elastomer-sealed MFCs suited for a wide variety of applications. The GE300A can be ranged from 150 to 300 slm (N2 equivalent) and is available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point. Settling times of 1 to 2 seconds and set point accuracies below 1% of setpoint exceeds typical high flow mass flow controllers. Precise control is maintained down to 2% of the configured Full Scale flow range. Multi-gas/multi-range capability and tight performance specifications for accuracy, control range, and transient response minimize flow controller inventory requirements. The multi-gas/multi-range feature and other custom controls are accessed through the embedded diagnostic interface. A standard Ethernet cable and JAVA-enabled HTML browser are the only tools needed. Critical gas parameters for typical high flow rate gases are already stored on the MFC. Configure an G-Series mass flow controller by selecting the gas from a drop-down menu and specify the desired Full Scale flow range. Perform routine device health checks, plot flow response, and store operating data for offline analysis with the G-Series MFC diagnostic interface.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range150-300 slm (N2 equivalent)
- Control Range2-100% of Full Scale (range on mech.)
- Fitting Type8 VCR male long
- Seal MaterialEPDM
- Flow Input Output Signal0 - 5 VDC, 4 - 20 mAProfibus (1179B Compatible)
- ConnectorEtherCAT
- Maximum Inlet Pressure150 psig (cannot exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential30-55 psid (dependent on fitting type with atmospheric pressure at the MFC outlet)
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for >20 - 100% Full Scale, ±0.25% of Full Scale for 5 - 20% Full Scale
- Repeatability±0.5% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.03% of Reading/psi or less
- Typical Settling Time1 - 2 sec above 10% Full Scale @ 50 psi
- Warm-up Time1 hour
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature- 20 to 65°C ( - 4 to 149° F)
- External Leak Integrity<1 x 10-9 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% Full Scale at 40 psia to vac (<500 mTorr) To assure no flow-through, a separate positive shut-off valve is required.
- Wetted Materials316 stainless steel, 17 - 1 stainless steel, Elgiloy, 430FR (Standard), Viton, Buna, Neoprene, EPDM
- Surface Finish16 µ inch average Ra
- Enclosure RatingIP66
- Power Requirements15-24 VDC @ (<4 watts)
- Weight<4.5 lbs. (2.05 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range150-300 slm (N2 equivalent)
- Control Range2-100% of Full Scale (range on mech.)
- Fitting Type8 VCR male long
- Seal MaterialEPDM
- Flow Input Output Signal0 - 5 VDC, 4 - 20 mAProfibus (1179B Compatible)
- ConnectorEtherCAT
- Maximum Inlet Pressure150 psig (cannot exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential30-55 psid (dependent on fitting type with atmospheric pressure at the MFC outlet)
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for >20 - 100% Full Scale, ±0.25% of Full Scale for 5 - 20% Full Scale
- Repeatability±0.5% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.03% of Reading/psi or less
- Typical Settling Time1 - 2 sec above 10% Full Scale @ 50 psi
- Warm-up Time1 hour
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature- 20 to 65°C ( - 4 to 149° F)
- External Leak Integrity<1 x 10-9 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% Full Scale at 40 psia to vac (<500 mTorr) To assure no flow-through, a separate positive shut-off valve is required.
- Wetted Materials316 stainless steel, 17 - 1 stainless steel, Elgiloy, 430FR (Standard), Viton, Buna, Neoprene, EPDM
- Surface Finish16 µ inch average Ra
- Enclosure RatingIP66
- Power Requirements15-24 VDC @ (<4 watts)
- Weight<4.5 lbs. (2.05 kg)
- ComplianceCE
Resources & Downloads
Drawings & CADs
GE300A Mass Flow Controller/Meter Dimensional Drawing(230.5 kB, PDF)