Multi-gas, Multi-range, Elastomer-sealed 100 to 300 slm Mass Flow Controllers
Overview
G-Series GE250A & GE300A mass flow controllers are general purpose, elastomer-sealed MFCs suited for a wide variety of applications. The GE250A is capable of Full Scale ranges from 100 to 250 slm (N2 equivalent). The GE300A is capable of Full Scale ranges from 150 to 300 slm (N2 equivalent). Both are available with either analog I/O or digital I/O utilizing the latest control algorithms for fast and repeatable response to set point.
- Flow Rates from 100 to 300 slm
- Seal and valve plug option of Viton, Buna, Neoprene or EPDM
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- 1 to 2 second settling time
Products
Configuration Options
The following options are available for GE250AA Elastomer-sealed 100-250 slm Mass Flow Controllers
Ordering Code Example: GE250A013255T8E0020
|
Configuration Option |
Option Code |
|---|---|
| GE250A Mass Flow Controller | GE250A |
Gas (Per Semi Standard E52-0703) |
|
| Helium (He) | 001 |
| Argon = (Ar) | 004 |
| Hydrogen = (H2) | 007 |
| Nitrogen (N2) | 013 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 250 slm (250,000 sccm) | 255 |
Fittings (compatible with) |
|
| 12 mm tube compression | F |
| 0.375 in. tube compression | J |
| 0.5 in. tube compression | S |
| 0.5 in. tube compression long | W |
| 0.5 in. NPT female | M |
| 8 VCR Male | T |
| 8 VCO Male | D |
| 8 VCR male long | L |
| 8 VCO male long | Q |
Connector |
|
| Profibus (1179B Compatible) | 3 |
| Profibus (1480 Compatible) | 4 |
| RS485 | 5 |
| DeviceNet | 6 |
| EtherCAT | 8 |
| PROFINET | 9 |
| 15 pin D (Analog 0 to 5 VDC) | B |
| 15 pin D (Analog 4 to 20 mA) | H |
Seal Materials |
|
| Viton® | V |
| Buna-N | B |
| Neoprene | N |
| EPDM | E |
| Viton (USP Class VI Compliant) | W |
Valve Type |
|
| Normally closed | 0 |
| Mass Flow Meter | 3 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
The following options are available for GE300AA Elastomer-sealed 150-300 slm Mass Flow Controllers
Ordering Code Example: GE300A013305TBV0020
|
Configuration Option |
Option Code |
|---|---|
| GE300A Mass Flow Controller | GE300A |
Gas (Per Semi Standard E52-0703) |
|
| Helium (He) | 001 |
| Argon = (Ar) | 004 |
| Hydrogen = (H2) | 007 |
| Nitrogen (N2) | 013 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 300 slm (300,000 sccm) | 305 |
Fittings (compatible with) |
|
| 12 mm Swagelok | F |
| 0.375 in. tube compression | J |
| 0.5 in. tube compression | S |
| 0.5 in. tube compression long | W |
| 0.5 in. NPT female | M |
| 8 VCR Male | T |
| 8 VCO Male | D |
| 8 VCR Male long | L |
| 8 VCO Male long | Q |
| W-Seal | H |
Connector |
|
| Profibus (1179B Compatible) | 3 |
| Profibus (1480 Compatible) | 4 |
| RS485 | 5 |
| DeviceNet | 6 |
| EtherCAT | 8 |
| PROFINET | 9 |
| 15 pin D (Analog 0 to 5 VDC I/O) | B |
| 15 pin D (4 to 20 mA I/O) | H |
Seal Materials |
|
| Viton® | V |
| Buna | B |
| Neoprene | N |
| EPDM | E |
| Viton (USP Class VI Compliant) | W |
Valve Type |
|
| Normally closed | 0 |
| Mass Flow Meter | 3 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 105 sccm or 250 slm; 105 is 1.0 x 105 sccm or 100 slm
Specifications
-
TypeMass Flow Controller
-
Full Scale Flow RangeGE250A: 100-250 slm
GE300A: 150-300 slm -
Control Range2-100% of Full Scale (range on mech.)
-
Fitting Type8 VCO® male
0.5 in. NPT female
0.5 in. Compression
8 VCR® male
12 mm Swagelok
0.375 in. Swagelok
W-seal
0.5 in. Compression Long
8 VCR Male Long
8 VCO Male Long -
Seal MaterialViton®, Buna, Neoprene®, EPDM, Viton (USP Class VI Compliant)
-
Maximum Inlet Pressure150 psig (can not exceed pressure differential requirement across MFC)
-
Normal Operating Pressure Differential30 to 55 psid (dependent on fitting type)
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for > 20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale -
Repeatability±0.5% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
-
Inlet Pressure Coefficient<0.03% of Reading/psi or less
-
Typical Settling Time1-2 seconds typical above 10% Full Scale @ 50 psi
-
Warm-up Time1 hour
-
Operating Temperature10-50°C
-
Storage Humidity0-95% relative humidity, non-condensing
-
Storage Temperature-20° to 65°C (-4° to 149° F)
-
External Leak Integrity<1 x 10-9
-
Leak Integrity Through Closed Valve< 1.0% Full Scale at 40 psia to vac (<500 mTorr)
-
Wetted Materials316L S.S. 17-7 S.S., Elgiloy®, 430FR
-
Surface Finish16μ inch average Ra
-
Power Requirements+15 to +24 VDC @ (<4 watts)
-
Weight<4.5 lbs (2.05 kg)
-
ComplianceCE
Resources
Literature
- GE250A Elastomer Sealed, Mass Flow Controller, 100-250 slm (257.3 kB, PDF)
- GE300A Elastomer Sealed, Mass Flow Controller, 150-300 slm (260.5 kB, PDF)
Application Notes
Manuals
- GE250A/IE250A User Manual (1055823) (2.4 MB, PDF)
- G-Series Mass Flow Controller/Meter DeviceNetâ„¢ Supplement (112.5 kB, PDF)
- G-Series Mass Flow Controller/Meter RS485 Supplement (149.3 kB, PDF)
- G-Series Mass Flow Controller/Meter PROFINET Communications Supplement (1 MB, PDF)
- G-Series/I-Series MFC Modbus Register Map and Specification (502.9 kB, PDF)
- G-Series MFC Web Browser Tutorial (5.6 MB, PDF)
Ultra-High Velocity