Mass Flow Controller, 250 slm (250,000 sccm), 0.5 in. tube compression, 0-5 VDC, DB15, Viton Seal

Technical Specs

  • Type
    Mass Flow Controller
  • Full Scale Flow Range
    000 sccm)
  • Calibration Gas
    Nitrogen
  • Fitting Type
    0.5 in. tube compression
  • Seal Material
    Viton
  • Analog Connector
    15 pin D (Analog 0-5 VDC)
  • Maximum Inlet Pressure
    150 psig (can not exceed pressure differential requirement across MFC)
  • Normal Operating Pressure Differential
    30-55 psid (dependent on fitting type)
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for > 20-100% Full Scale
    ±0.25% of Full Scale for 5- 20% Full Scale
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.03% of Reading/psi or less
  • Typical Settling Time
    1-2 seconds typical above 10% Full Scale @ 50 psi
  • Warm-up Time
    1 hour
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • External Leak Integrity
    <1 x 10-9
  • Leak Integrity Through Closed Valve
    < 1.0% Full Scale at 40 psia to vac (<500 mTorr)
  • Wetted Materials
    316L S.S. 17-7 S.S., Elgiloy®, 430FR
  • Surface Finish
    16μ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Need help?

Contact an Applications Specialist by sending us an email