The GE300A is a general purpose, elastomer sealed MFM well suited for a wide variety of applications requiring flow measurement capability from 300 sccm to 300 slm Full Scale, N2 equivalent.The GE300A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design. This MFM is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing accurate, and repeatable, Flow measurement.
The following options are available for GE300A Mass Flow Meters
Ordering Code Example: GE300A013305TBR3020
Configuration Option |
Option Code |
---|---|
GE300A Mass Flow Controller | GE300A |
Gas (Per Semi Standard E52-0703) |
|
Helium (He) | 001 |
Argon = (Ar) | 004 |
Hydrogen = (H2) | 007 |
Nitrogen (N2) | 013 |
Other Gas Options | See Here |
Flow Range Full Scale |
|
300 slm (300,000 sccm) | 305 |
Fittings (compatible with) |
|
12 mm Swagelok | F |
0.375 in. tube compression | J |
0.5 in. tube compression | S |
0.5 in. tube compression long | W |
0.5 in. NPT female | M |
8 VCR Male | T |
8 VCO Male | D |
8 VCR Male long | L |
8 VCO Male long | Q |
W-Seal | H |
Connector |
|
Profibus (1179B Compatible) | 3 |
Profibus (1480 Compatible) | 4 |
RS485 | 5 |
DeviceNet | 6 |
EtherCAT | 8 |
PROFINET | 9 |
15 pin D (Analog 0 to 5 VDC I/O) | B |
15 pin D (4 to 20 mA I/O) | H |
Seal Materials |
|
Viton® | V |
Buna | B |
Neoprene | N |
EPDM | E |
Viton (USP Class VI Compliant) | W |
Valve Type |
Mass Flow Meter | 3 |
Reserved |
|
Reserved | 0 |
Firmware |
|
MKS will ship firmware revision current to date | 20 |
* For gases not listed in the standard products gas table, please contact the MKS applications department for assistance.
** The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 255 is 2.5 x 105 sccm or 250 slm; 105 is 1.0 x 105 sccm or 100 slm
The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.
Digital I/O | DeviceNet™ | RS485 | Profibus® | EtherCAT® | PROFINET® |
---|---|---|---|---|---|
Input Power Required | +11 to +25 VDC per (<2 watts) | +15 to +24 VDC (<2 watts) | +15 to +24 VDC (<2 watts) | +24 VDC (<3 watts) | +24 VDC (<3 watts) |
Connector | 5 pin micro connector (power and comm.) | 9 pin Type D male (power and comm.) | 9 pin Type D male (power) 9 pin Type D female (comm.) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default) (programmable over network) |
No switch Set data rate via RS485 | No switch Set data rate via Profibus | No switch | No switch |
Comm. Rate(s) | 125 Kbps; 250 Kbps; 500 Kbps | 9.6 Kbps; 19.2 Kbps 38.4 Kbps | 9.6 Kbps to 12 Mbps | 100 Mbps | 100 Mbps |
MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 1 to 254 | Set address over RS485 Station Addresses 0,0 to 9,9 | 2 switches, 10 positions | 3 switches, 16 positions | N/A |
Network Size | Up to 64 nodes | Up to 32 nodes | Up to 99 nodes | Up to 4095 nodes | N/A |
Visual Indicators | LED Network (green/red) LED Module (green/red) |
LED Comm (yellow) LED Error (red) |
LED Comm (green/red) LED Error (green/red) |
LED Power (green) LED Run (green) LED Error (red) LED Comm (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
Compliance | CE | CE | CE | CE | CE |