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Manuals

 

User manual for the 122A Baratron® Absolute Pressure Gauge

Drawings & CADs

R740 & R750 High-Pressure Baratron® Capacitance Gauge Dimensional Drawings

MKS Instruments R740C High-Pressure Baratron® Gauge Capacitance Transducer with Trip Relays (20 - 3000 PSIG) and R750C High-Pressure Baratron® Absolute Capacitance Transducer with Trip …

Drawings & CADs

740 & 750 Baratron® Capacitance Manometer Dimensional Drawings

MKS Instruments 740C High-Pressure Baratron® Gauge Capacitance Manometer (20 - 3000 PSIG) and 750C High-Pressure Baratron® Absolute Capacitance Manometer (10 Torr - 3000 PSIA)

Application Notes

Pressure Product Cross Reference

A list of discontinued MKS Pressure/Vacuum measurement products and a link to the recommended replacement products.

Technical Notes

Introduction to Vacuum Pressure Measurement

Many different types of vacuum gauge are available for applications with different range, accuracy, and materials requirements. The selection of a vacuum gauge for a given vacuum application …

Drawings & CADs

42, 52 Baratron® Pressure Switch Dimensional Drawing

MKS Instruments 42B Baratron® Flow-Through Gauge and 52B Baratron® Flow-Through Absolute Pressure Switches (10 - 26,000 Torr)

Technical Papers

Baratron Capacitance Manometers - Baratron Basics

Learn about the care and maintenance of Baratron® Capacitance Manometers.

Drawings & CADs

41, 51 Baratron® Pressure/Vacuum Switch Dimensional Drawing

MKS Instruments 41B Baratron® Single-End Gauge and 51B Baratron® Single-end, Absolute Pressure/Vacuum Switch (10-26,000 Torr)

Other

Warranty Terms

MKS' warranty terms which are subject to and referenced in the MKS Terms and Conditions of Sale.

Literature

R740C and R750C Capacitance Transducers (archive)

ARCHIVE - MKS Instruments R740C and R750C Baratron® High-Pressure Capacitance Transducers with Trip Relays R740C (gauge, 10 Torr - 3000 PSIA) and R750C (absolute, 10 Torr - 3000 PS …

Manuals

 

Installation and operation manual for the HPS Series 937A, RS-232 / RS-485 Combination Vacuum Gauge Controller, for use with Series 421/423/345/317 Sensors, 902 Transducer and Baratron® …

Technical Notes

Vacuum Pressure Control for Semiconductor Fabrication

Stable and precise control of a processing system's vacuum pressure is critical for high-yield semiconductor device fabrication. Processes such as SAPCVD, LPCVD and etch exhibit optimal …

Technical Notes

Mass Flow Technology

Tech Note: The terms mass flow or mass transfer refer to the movement of a liquid or gaseous material in a conducting element such as a tube or channel. Examples of liquid mass flow …

Application Notes

Configuring 640/641 Compact Pressure Controllers

Instructions for configuring 640 and 641 pressure controllers.

Literature

Baratron® Vacuum Pressure Switches

MKS Instruments 141A Baratron® Absolute Ambient Vacuum Switch (0.1-1000 Torr) and 142A Baratron® Absolute Heated Vacuum Switch, Heated to 100°C (1-1000 Torr).

Drawings & CADs

AA02 Baratron® Dimensional Drawings

MKS Instruments a-Baratron® Heated Absolute Capacitance Manometers for High-performance Vacuum/Pressure Measurement (0.1-1000 Torr/13.3 Pa - 133.3 kPa)

Manual

 

Instruction manual for the MKS DA06A 3-Decade Temperature-controlled Baratron® Manometerr with EtherCAT® (20047113-001)

Manual

 

Instruction manual for the MKS DA05A 0.1-1.0 Torr Heated Baratron® Capacitance Manometer (20067858)

Manuals

 

Manual for MKS Instruments Baratron® 223B Pressure Transducer. An 86 kb Adobe Acrobat PDF file.

Manuals

 

Manual for MKS Instruments DMA Digital Absolute Capacitance Manometer with DeviceNet® Digital Interface