HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer
Model: HPQ3S
HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer
Model: HPQ3S
Overview
Overview
The HPQ3S allows operation far beyond the 1.0 x 10-4 mbar total pressure limit of other residual gas analyzers without the need for differential pumping. Field-proven technology coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument. The HPQ3S has a variety of software control options to match the requirements of any application. For specific higher pressure applications up to 1.0 x 10-2 mbar the HPQ3S makes real-time corrections using a gauge pressure from the tool or by using a variety of optional independent gauges fitted to a custom F-Chamber designed for optimum performance.
Technical Specs
- Mass Range1 - 100 amu
- FilamentsTwin Tungsten or Thoria Coated Iridium
- DetectorFaraday
- Maximum Analyzer Operating Pressure8e-3 Torr (1e-2 mbar) - Application dependent
- Minimum Detectable ConcentrationPartial Pressure: 8e-11 Torr (1e-10 mbar), Concentration: 5 ppm at 1e-3 Torr (1.3e-3 mbar) (3 sigma baseline noise at 300 ms integration)
- Mass StabilityBetter than ±0.1 amu over 8 hours
- ResolutionBetter than 10% valley for peaks of equal height across mass range
- Mounting FlangeDN38CF (70 mm/2.75 in. OD) Conflat
- Bake Out Temperature250°C with electronics removed
- Operating Temperature200°C at flange with electronics <40°C
- Electronics Weight on Flange1.7 kg
- Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
- SoftwareBuilt-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software, Process Eye Professional and TOOLweb RGA Windows software packages for Windows XP, Vista or Win7 (32 and 64 bit.)
- Communication10/100 Base-T Ethernet, static or automatically assigned IP addresses
- TypeResidual Gas Analyzer
- Measurement TechniqueMass Spectrometry
- ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Technical Specs
- Mass Range1 - 100 amu
- FilamentsTwin Tungsten or Thoria Coated Iridium
- DetectorFaraday
- Maximum Analyzer Operating Pressure8e-3 Torr (1e-2 mbar) - Application dependent
- Minimum Detectable ConcentrationPartial Pressure: 8e-11 Torr (1e-10 mbar), Concentration: 5 ppm at 1e-3 Torr (1.3e-3 mbar) (3 sigma baseline noise at 300 ms integration)
- Mass StabilityBetter than ±0.1 amu over 8 hours
- ResolutionBetter than 10% valley for peaks of equal height across mass range
- Mounting FlangeDN38CF (70 mm/2.75 in. OD) Conflat
- Bake Out Temperature250°C with electronics removed
- Operating Temperature200°C at flange with electronics <40°C
- Electronics Weight on Flange1.7 kg
- Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
- SoftwareBuilt-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software, Process Eye Professional and TOOLweb RGA Windows software packages for Windows XP, Vista or Win7 (32 and 64 bit.)
- Communication10/100 Base-T Ethernet, static or automatically assigned IP addresses
- TypeResidual Gas Analyzer
- Measurement TechniqueMass Spectrometry
- ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Resources & Downloads
Drawings & CADs
HPQ3/HPQ3S RGA Dimensional Drawing(127 kB, PDF)