Vacuum Process and Chamber Environment Monitors

Our process monitors are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), analytical equipment, and control software. Process mass spectrometers are used in varied applications, including; Semiconductor, Thin Film (CVD, Etch, PVD and degas), pharmaceutical lyophylization and bulk gas purity monitoring.
Showing 13 products in 11 families
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Vision 2000-A RGA for ALD & CVD
1 Products
Vision 2000-A XD High Sensitivity RGA for ALD & CVD
1 Products
vision 2000-b vacuum baseline rga for process tools
Vision 2000-B™ Vacuum Baseline RGA for Process Tools
1 Products
vision 2000-c and e rga for multi-pressure and cvd/ald processes
Vision 2000-C™ & E™ RGAs for Multi-pressure & CVD/ALD Processes
2 Products
vision 2000-c and e xd high sensitivity multi-pressure, cvd/ald rga
Vision 2000-C™-E™ XD High Sensitivity RGAs for Multi-pressure & CVD/ALD
2 Products
vision 2000-p rga for select pressure & pvd
Vision 2000-P™ RGA for Select Pressure & PVD Processes
1 Products
vision 2000-p xd high sensitivity rga for select pressure & pvd
Vision 2000-P™ XD High Sensitivity RGAs for Select Pressure & PVD
1 Products
300mm photoresist detection monitor for high pressure degas
300 mm Resist-Torr Photoresist Detection Monitor for High Pressure Degas
1 Products
300mm resist-torr xd high sensitivity photoresist detection monitor
300 mm Resist-Torr® XD High Sensitivity Photoresist Detection Monitor
1 Products
hpq3 high pressure residual gas analyzer
HPQ3 High Pressure 0.001 Torr Residual Gas Analyzers
1 Products
hpq3s high pressure residual gas analyzer
HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer
1 Products

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