e-Vision 2 General Purpose Residual Gas Analyzer

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Overview

The e-Vision 2 RGA is one of a new range of residual gas analysis products, from MKS Instruments, designed to meet all the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. The e-Vision 2 RGA is designed to provide maximum value for money.

Leak detection of vacuum lines, welds and seals
Vacuum diagnostics
Pump down monitoring
Chamber bake out monitoring
Leak checking of coolant lines within a vacuum chamber
Chamber contaminant monitoring

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Products

Compare	Description	Compatibility	rankScore	Mass Range	Detector	Ion Source	Availability	Price
EV2-110-000FT Residual Gas Analyzer, 1-100 amu, Faraday Detector, Open Ion Source $5,200 14 Weeks	EV2-110-000FT Residual Gas Analyzer, 1-100 amu, Faraday Detector, Open Ion Source	UNIVERSAL	1.0	1-100 amu	Faraday	Open	14 Weeks	$5,200
EV2-120-000FT Residual Gas Analyzer, 1-100 amu, Multichannel Plate Dual Detector, Open Ion Source $6,615 14 Weeks	EV2-120-000FT Residual Gas Analyzer, 1-100 amu, Multichannel Plate Dual Detector, Open Ion Source	UNIVERSAL	1.0	1-100 amu	Multichannel Plate Dual	Open	14 Weeks	$6,615
EV2-210-000FT Residual Gas Analyzer, 1-200 amu, Faraday Detector, Open Ion Source $6,221 14 Weeks	EV2-210-000FT Residual Gas Analyzer, 1-200 amu, Faraday Detector, Open Ion Source	UNIVERSAL	1.0	1-200 amu	Faraday	Open	14 Weeks	$6,221
EV2-220-000FT Residual Gas Analyzer, 1-200 amu, Multichannel Plate Dual Detector, Open Ion Source, Tungsten Filaments $7,901 14 Weeks	EV2-220-000FT Residual Gas Analyzer, 1-200 amu, Multichannel Plate Dual Detector, Open Ion Source, Tungsten Filaments	UNIVERSAL	1.0	1-200 amu	Multichannel Plate Dual	Open	14 Weeks	$7,901

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Configuration Options

e-Vision 2 General Purpose Residual Gas Analyzers are also available with the following options.
Ordering Code Example: EV2-120-000

Configuration Option	Option Code
e-Vision 2 Residual Gas Analyzer	EV
Software Option
Web Application Only	2
EasyView	E
Mass Range
100 amu	1
200 amu	2
Detector Type
Faraday Only	1
Multichannel Plate Dual	2
Reserved
Reserved	0-00
Filament
Tungsten Filaments	0
Thoria Coated Iridium	1

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	Description
	E-VISION-2 Residual Gas Analyzer, General Purpose, e-Vision 2

Specifications

Type

Residual Gas Analyzer
Measurement Technique

Mass Spectrometry
Mass Range

1-100 or 1-200 amu
Filaments

Tungsten or Thoria Coated Iridium
Software

Built-in web applications allowing RGA control and data acquisition without installed software using web browser on any PC
Optional Easy View Software available
Filter length

4 in. (100 mm)
Maximum Analyzer Operating Pressure

1e^-4 Torr (1.3e^-4 mbar)
Ion Source Sensitivity

2e^-4 A/mbar
Minimum Detectable Concentration

2e^-11 Torr (2.6e^-11 mbar) Faraday
5e-14 Torr (6.7e-14 mbar) Multiplier
Mass Stability

±0.1 amu over 8 hours at stable ambient
Bake Out Temperature

250°C with electronics removed

Operating Temperature

200°C Faraday only with electronics 10-40°C
150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
Data Acquisition Method

Dedicated realtime acquisition processor
Data Acquisition Speed

<3ms per point for analog scans
Data Collection Methods

Analog scanning, full mass range 8, 16 or 32 points/amu
Barchart scanning
Peak-jump collection of up to 15 peaks per scan
Settling Time

<20ms
Control Method

CE operating system processor with web-server interface
Command Structure

Documented ASCII command protocols
Electron Energy & Emission Current

40 or 70eV fixed (set in web configuration)
Filament Protection

Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe
Communication

10/100 Base-T Ethernet, static or automatically assigned IP addresses
Compliance

CE (control unit)

Specifications

Type

Residual Gas Analyzer
Measurement Technique

Mass Spectrometry
Mass Range

1-100 or 1-200 amu
Filaments

Tungsten or Thoria Coated Iridium
Software

Built-in web applications allowing RGA control and data acquisition without installed software using web browser on any PC
Optional Easy View Software available
Filter length

4 in. (100 mm)
Maximum Analyzer Operating Pressure

1e^-4 Torr (1.3e^-4 mbar)
Ion Source Sensitivity

2e^-4 A/mbar
Minimum Detectable Concentration

2e^-11 Torr (2.6e^-11 mbar) Faraday
5e-14 Torr (6.7e-14 mbar) Multiplier
Mass Stability

±0.1 amu over 8 hours at stable ambient
Bake Out Temperature

250°C with electronics removed

Operating Temperature

200°C Faraday only with electronics 10-40°C
150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
Data Acquisition Method

Dedicated realtime acquisition processor
Data Acquisition Speed

<3ms per point for analog scans
Data Collection Methods

Analog scanning, full mass range 8, 16 or 32 points/amu
Barchart scanning
Peak-jump collection of up to 15 peaks per scan
Settling Time

<20ms
Control Method

CE operating system processor with web-server interface
Command Structure

Documented ASCII command protocols
Electron Energy & Emission Current

40 or 70eV fixed (set in web configuration)
Filament Protection

Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe
Communication

10/100 Base-T Ethernet, static or automatically assigned IP addresses
Compliance

CE (control unit)

Features

Sensor Performance

Field proven MKS quadrupole mass analyzers, with twin filaments as standard, ensure minimum downtime during critical diagnostic testing. The RGA is available with an optional dual detector including a faraday detector and microchannel plate electron multiplier for detection to e^-14 mbar.

Electronics Performance

Data acquisition occurs through all solid state, wide dynamic range, fast settling detector electronics. This technology prevents large peaks from causing false positive measurements on small peaks. Temperature stabilized critical components mean that signal stability and baseline drift are improved, allowing the unit to be used without frequent recalibration if the vacuum chamber is stable but ambient air temperature fluctuates.

Built-in Web Application

A web interface using industry standard technology allows control of the e-Vision 2 as well as calibration, operation and data export through a non platform-specific web browser from anywhere on a network. Using the ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the e-Vision 2.

Built-in web application for e-Vision 2 control and data acquisition

EasyView Software

In addition to the standard, built-in web applications, software control is also available through an optional Windows application, offering the best possible fit to any customer requirement. The field proven software provides basic RGA controls but with more functionality than the built-in web application.

Store RGA data and recall it back into the Recall viewer
Annotate graphs with notes
Run several RGAs from one software package

EasyView software for more sophisticated data management and control of multiple RGAs

Applications

The e-Vision 2 is suitable for a wide range of applications including:

Leak detection of vacuum lines, welds and seals
Vacuum diagnostics
Pump down monitoring
Chamber bakeout monitoring
Leak checking of coolant lines within a vacuum chamber
Chamber contaminant monitoring
Monitor cryo-pump performance
Monitor getter performance

e-Vision 2 in use as a troubleshooting tool on vacuumbased surface analysis equipment