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microvision 2 residual gas analyzer
MICROVISION-2
Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2
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 MICROVISION-2 Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2
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Specifications

  • Mass Range
    Double: 100, 200, 300 amu
    5" Single: 100, 200 amu
    Triple: 100, 200, 300 amu
  • Faraday
    1.5 x 10-11 Torr
  • Filaments
    Tungsten or Thoria coated Iridium
  • Maximum Analyzer Operating Pressure
    7.6 x 10-5 Torr
  • Ion Source Sensitivity
    2.0 x 10-4 A/mbar
  • Minimum Detectable Concentration
    3 standard deviations of baseline noise at 300 ms integration
  • Resolution
    Better than 10% valley for peaks of equal height across mass range
  • Bake Out Temperature
    250°C (with extender or electronics removed)
  • Operating Temperature
    200°C Faraday only with electronics 10-40°C 150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar 90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
  • UHV Out-gassing Rate
    < 1.0 x 10-9 mbar -l/s
  • Microchannel plate
    3.8 x 10-14 Torr
  • Single channel EM
    7.6 x 10-15 Torr (triple version)
  • Mounting Flange
    DN 40 CF-F

Features

Microvision 2 Sensors

Microvision 2 has field proven quadrupole mass analyzer designs with pre-filters and optional post filters for:

  • Greater resistance to the effects of contamination than a single filter
  • Greater sensitivity at higher masses compared to single filters, critical to monitoring many molecules used in CVD processes
  • Wide range of ion sources
  • Twin independent filaments as standard to ensure minimum downtime during critical process monitoring
  • Standard dual detector including a faraday detector and microchannel plate electron multiplier for detection to e-14 mbar partial pressures

Signals close to the noise floor can still be reliably measured, even immediately after measuring very large signals

Microvision 2 Electronics

Data acquisition occurs through all solid state, wide dynamic range, fast settling detector electronics:

  • Prevents large peaks from causing false positive measurements on small peaks
  • Temperature stabilized critical components with improved signal stability and baseline drift allow the unit to be used without frequent recalibration if the vacuum chamber is stable but ambient air temperature fluctuates
  • Variable sensor conditions to match the needs of each process
  • Each optimization is separately stored in the RGA and automatically recalled or recalibrated by software recipes
  • Flexible digital and analog I/O capability with a dedicated gauge port as standard
  • Option to add extra levels of I/O and communications ports built into the RGA electronics

Faster and more accurate responses are possible in closed-loop control applications where the RGA is process critical

Built-in Web Interface

A web interface using industry standard technology allows control of the Microvision 2 as well as calibration, operation and data export through a non platform-specific web browser from anywhere on a network.

Using the documented ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the Microvision 2.

Built-in web application for Microvision 2 control and data acquisition

Software Flexibility & Scalability without Compromise

Process Eye Professional for flexible control through recipe-driven data collection

In addition to the standard, built-in web applications, software control is also available through three Windows applications, offering the best possible fit to any customer’s requirements.

EasyView – provides basic RGA controls but with more functionality than the built-in web application:

  • Store RGA data and review it later in the Recall viewer
  • Annotate graphs with notes stored into the data files
  • Run several RGAs from one software package

Process Eye Professional – offering complete control of all RGA parameters:

  • Recipe driven control to allow the highest level of flexibility but with ease of use through the EasyView recipe and Recipe Wizard
  • Ability to link to other systems through a variety of mechanisms such as Modbus, ASCII, SECS protocols, serial communications, TCP-IP, file exchange and many others
  • Flexibility to run customized data collection, alarm condition checking and closed loop control operations

TOOL web RGA – specialized tool integration software providing optimized methods to get the most reliable information from RGAs on process tools:

  • Complete integration of RGA data with tool operation and FDC systems
  • Levels of interdiction from passive monitoring of the tool vacuum, to process critical go/stop control of individual process chambers
  • Powerful web based reporting provides process engineers with highly valuable information to keep tools running at peak efficiency

Resources

Drawings & CADs

Literature

Technical Notes

Application Notes

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