GV50A Elastomer sealed 5-50,000 sccm Mass Flow Controllers with Shut-off Valve
Model: GV50A
GV50A Elastomer sealed 5-50,000 sccm Mass Flow Controllers with Shut-off Valve
Model: GV50A
Overview
Overview
The GV50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics use the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 600 to 800 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. I/O protocols are designed to allow the GV50A to easily replace RS485 and DeviceNet™versions of the MKS 2179A MFC with minor coding. The GV50A incorporates a normally-closed, shut-off valve for closure to 4x10E-09 scc/sec of Helium. It incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GV50A comes standard with Viton® seals or optional Buna, Neoprene® or Kalrez® to support different gas requirements. The GV50A is a general purpose, MFC suited for a wide variety of applications requiring flow control capability from 10 sccm to 50 slm Full Scale, N2 equivalent.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5 sccm - 50 slm (N2 equivalent)
- Control Range2-100% of Full Scale
- Fitting TypeSwagelok 4 VCO male
- Seal MaterialNeoprene®
- Flow Input Output Signal0-5 VDC, 4-20 mA
- ConnectorPROFINET
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 - 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, above 5% Full Scale (per SEMI Guideline E-17-0600)
- Warm-up Time<30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- External Leak Integrity<1 x 10-9 (scc/sec He)
- Leak Integrity Through Closed ValveUp to 10K valve <0.1% of Full Scale at 40 psig to atmosphere, 20K - 50K valve <1.0% of Full Scale at 40 psig to atmosphere (to assure no flow-through, a separate positive shut-off valve is required)
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy®, KM - 45, Viton, Buna - N, EPDM, Kalrez or Neoprene
- Surface Finish16 µ inch average Ra
- Power Requirements15-24 VDC @ (<4 watts)
- Pneumatic Valve Supply Pressure60-120 psig
- Weight<3 lbs. (1.4 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5 sccm - 50 slm (N2 equivalent)
- Control Range2-100% of Full Scale
- Fitting TypeSwagelok 4 VCO male
- Seal MaterialNeoprene®
- Flow Input Output Signal0-5 VDC, 4-20 mA
- ConnectorPROFINET
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 - 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, above 5% Full Scale (per SEMI Guideline E-17-0600)
- Warm-up Time<30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- External Leak Integrity<1 x 10-9 (scc/sec He)
- Leak Integrity Through Closed ValveUp to 10K valve <0.1% of Full Scale at 40 psig to atmosphere, 20K - 50K valve <1.0% of Full Scale at 40 psig to atmosphere (to assure no flow-through, a separate positive shut-off valve is required)
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy®, KM - 45, Viton, Buna - N, EPDM, Kalrez or Neoprene
- Surface Finish16 µ inch average Ra
- Power Requirements15-24 VDC @ (<4 watts)
- Pneumatic Valve Supply Pressure60-120 psig
- Weight<3 lbs. (1.4 kg)
- ComplianceCE
Resources & Downloads
Drawings & CADs
GV50 Mass Flow Controller Dimensional Drawing(335.8 kB, PDF)