The G-Series GV50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics use the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 600 to 800 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
The following options are available for GV50A Mass Flow Controllers with Shut-off Valve
Ordering Code Example: GV50A013502R6V020
Configuration Option |
Option Code |
---|---|
GV50A Mass Flow Controller | GV50A |
Gas (Per Semi Standard E52-0703) |
|
Nitrogen (N2) | 013 |
Ammonia (NH3) | 029 |
Sulfur Hexafluoride (SF6) | 110 |
Other Gas Options | See Here |
Flow Range Full Scale |
|
5 sccm | 500 |
10 sccm | 101 |
20 sccm | 201 |
50 sccm | 501 |
100 sccm | 102 |
200 sccm | 202 |
500 sccm | 502 |
1000 sccm | 103 |
2000 sccm | 203 |
5000 sccm | 503 |
10000 sccm | 104 |
20000 sccm | 204 |
30000 sccm | 304 |
50000 sccm | 504 |
Fittings (compatible with) |
|
6 mm Swagelok | M |
8 mm Swagelok | E |
10 mm Swagelok | P |
12 mm Swagelok | F |
0.125 in. Swagelok (1000 sccm or below) | A |
0.25 in. Swagelok | S |
0.5 in. Swagelok | K |
0.375 in. Swagelok | J |
2 VCR Male (1000 sccm or below) | B |
4 VCR Male | R |
8 VCR Male | T |
4 VCO Male | G |
8 VCO Male | D |
NW16 ISO-KF | U |
Connector |
|
EtherCAT | 8 |
DeviceNet | 6 |
RS485 (9 pin connector) | 5 |
Profibus (1480 Compatible) | 4 |
Profibus (1179B Compatible) | 3 |
PROFINET | 9 |
9 pin D connector (Analog 0-5 VDC) | A |
9 Pin D connector, Tied Grounds (Analog 0-5 VDC) | L |
15 pin D connector (Analog 0-5 VDC) | B |
15 pin D connector, Tied Grounds (Analog 0-5 VDC) | M |
15 pin D connector (Analog 4-20 mA) | H |
Seal Materials |
|
Viton® | V |
Buna-N | B |
Neoprene® | N |
EPDM | E |
Kalrez | K |
Valve/Device Type |
|
Normally Closed | 0 |
Firmware |
|
MKS will ship firmware revision current to date | 20 |
Digital I/O | DeviceNet™ | RS485 | Profibus® | EtherCAT® | PROFINET® |
---|---|---|---|---|---|
Input Power Required | +11 to +25 VDC per (<2 watts) | +15 to +24 VDC (<2 watts) | +15 to +24 VDC (<2 watts) | +24 VDC (<3 watts) | +24 VDC (<3 watts) |
Connector | 5 pin micro connector (power and comm.) | 9 pin Type D male (power and comm.) | 9 pin Type D male (power) 9 pin Type D female (comm.) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default) (programmable over network) |
No switch Set data rate via RS485 | No switch Set data rate via Profibus | No switch | No switch |
Comm. Rate(s) | 125 Kbps; 250 Kbps; 500 Kbps | 9.6 Kbps; 19.2 Kbps 38.4 Kbps | 9.6 Kbps to 12 Mbps | 100 Mbps | 100 Mbps |
MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 1 to 254 | Set address over RS485 Station Addresses 0,0 to 9,9 | 2 switches, 10 positions | 3 switches, 16 positions | N/A |
Network Size | Up to 64 nodes | Up to 32 nodes | Up to 99 nodes | Up to 4095 nodes | N/A |
Visual Indicators | LED Network (green/red) LED Module (green/red) |
LED Comm (yellow) LED Error (red) |
LED Comm (green/red) LED Error (green/red) |
LED Power (green) LED Run (green) LED Error (red) LED Comm (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
Compliance | CE | CE | CE | CE | CE |
The GV50A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GV50A’s analog and digital I/O can easily be used to replace those same I/O types of the 2179A MFCs. All GV50As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
The GV50A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range enabling its use without the need to modify existing gas line configurations.
The design of the GV50A incorporates a minimal use of elastomers. There is only one external elastomer seal and elastomer valve plug. Otherwise, all wetted surfaces are of metal. The GV50A comes standard with Viton® seals along with options for Buna, Neoprene®, EPMD or Kalrez® allowing for the device’s use with gases requiring one of these alternatives.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.