CMA10B
Model: CMA10B-MFC
CMA10B
Model: CMA10B-MFC
Overview
Overview
15-14,000 sccm Compact, Fast Response Mass Flow Controller
The C-Series compact design is only 1 inch (25.4 mm) and less than 4.4 inches (111.8 mm) high. It has standard lengths of 4.88 inches (124 mm) for 4 VCR® male and 4.54 inches (113 mm) for 0.25 inch compression seal gas line connections. Downmount versions are also available.
The C-Series incorporates a fast-acting solenoid control valve coupled with the flow sensor via the MFC’s superior flow signal processing and control algorithm. This results in response times to set point of less than 100 milliseconds.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5000 sccm
- Zero Temperature Coefficient≤0.005% of Full Scale/°C
- Span Temperature Coefficient≤0.06% of Reading/°C
- Warm-up Time≤1 min
- Fitting TypeW-Seal (1.125 in. Wide Seal Configuration)
- ConnectorPROFINET
- Wetted MaterialsAluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
- Seal MaterialViton
- Valve TypeNo Valve/MFM (Same length as MFC)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range5000 sccm
- Zero Temperature Coefficient≤0.005% of Full Scale/°C
- Span Temperature Coefficient≤0.06% of Reading/°C
- Warm-up Time≤1 min
- Fitting TypeW-Seal (1.125 in. Wide Seal Configuration)
- ConnectorPROFINET
- Wetted MaterialsAluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
- Seal MaterialViton
- Valve TypeNo Valve/MFM (Same length as MFC)
- ComplianceCE