C-Series Mass Flow Controllers (MFC) are compact, fast-response models using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. It is available in Full Scale flow rates from 15 to 14,000 sccm (N2) with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale. Analog (0 to 5 VDC), RS485, PROFINET® and Modbus communications interfaces are available.