The C-Series CMA10B Mass Flow Meter (MFM) is a compact, fast response, model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 15 sccm to 14000 sccm, N2 with flow measurement from as low as 0.1% of Full Scale up to 100% of Full Scale. Communication interfaces are either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP). The required power supply voltage is 24 VDC nominal.
The following options are available for C-Series Mass Flow Meters
Ordering Code Example: CMA10B013102RCV3010
Configuration Option |
Option Code |
---|---|
Model |
|
CMA10B | CMA10B |
Gas (Per Semi Standard E52-0703) |
|
He | 001 |
Ar | 004 |
Air | 008 |
N2 | 013 |
O2 | 015 |
SF6 | 110 |
For other gases, contact MKS Instruments Flow range is based on gas - see the Selection Table below. |
|
Flow Range Full Scale |
|
50 sccm | 501 |
100 sccm | 102 |
200 sccm | 202 |
500 sccm | 502 |
1000 sccm | 103 |
2000 sccm | 203 |
5000 sccm | 503 |
10000 sccm | 104 |
Fittings (compatible with) |
|
4 VCR Male | R |
0.25 in. Compression | S |
Downmount O-ring Seal | C |
For other options, contact MKS Instruments | |
Connector |
|
Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary | R |
Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary | C |
Modbus TCP | M |
PROFINET | 9 |
Seal Materials |
|
Viton | V |
Valve/Device Type |
|
No Valve/Mass Flow Meter (Same length as MFC) | 3 |
No Valve/Mass Flow Meter (Reduced Length) Reduced length not available for W-Seal or Downmount O-ring Seal fittings |
4 |
Reserved (future use) |
|
Standard Build | 0 |
Firmware |
|
RS485/Analog Dual I/O | 10 |
Modbus TCP | 10 |
PROFINET | 10 |
Digital I/O | RS485 | PROFINET® | Modbus |
---|---|---|---|
Input Power Required | 24 VDC @ (±10%), <4 watts | +24 VDC (<5 watts) | +24 VDC (<5 watts) |
Connector | 9 pin Type D male (power and comm.) | 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) | 1 x RJ-45 (comm.) male,DC power plug |
Data Rate Switch/Selection | No switch Set data rate via RS485 |
MFC: No switch MFM: N/A |
N/A |
Comm. Rate(s) | 9.6 Kbps 19.2 Kbps 38.4 Kbps |
MFC: 100 Mbps MFM: N/A |
N/A |
MAC ID Switches/Addresses | Set address over RS485 Station Addresses 0,0 to 9,9 | N/A | N/A |
Network Size | Up to 32 nodes | N/A | N/A |
Visual Indicators | LED Power LED Run (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
LED Module LED Network |
Compliance | CE | CE | CE |
C-Series mass flow controllers and meters are selected based on the gas and range desired. Use this table to determine the best model for your application:
CMA10B | |||
Gas SEMI# | Gas Symbol | Minimum Full Scale | Maximum Full Scale |
1 | He | 23 | 16000 |
4 | Ar | 40 | 14000 |
8 | Air | 15 | 14000 |
13 | N2 | 15 | 14000 |
15 | O2 | 14 | 13000 |
110 | SF6 | 7 | 4500 |