Configuration Options

Description
CMA10B-MFM Mass Flow Meter, Compact, Ultrafast

Specifications

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    15-14,000 sccm (N2)
  • Maximum Inlet Pressure
    80 psig
  • Proof Pressure
    232 psi/16 bar
  • Burst Pressure
    1000 psi/70 bar
  • Measurement Range
    0.1-100% of Full Scale
  • Typical Accuracy
    ±0.8% of Reading
  • Repeatability
    ±0.2% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    ≤0.005% of Full Scale/°C
  • Span Temperature Coefficient
    ≤0.06% of Reading/°C
  • Pressure Coefficient
    <0.025% of Reading/psi
  • Warm-up Time
    ≤1 min
  • Operating Temperature
    10-50°C (32-122°F)
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • Storage Temperature
    0-60°C (32-140°F)
  • Fitting Type
    Compatible with:
    Swagelok® 4 VCR® male
    surface mount (o-ring and w-seal)
    0.25 in. Swagelok compression
  • External Leak Integrity
    <1 x 10-09
  • Wetted Materials
    Standard: Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
    Valve Seat:Viton
  • Set Point Command Signal
    0-5 VDC (0-10 VDC, optional)
  • Power Requirements
    24 VDC @ (±10%), <2 watts
  • Flow Input Output Signal
    0-5 VDC (0-10 VDC, optional)
  • Analog I/O Connector
    9-pin Type D
  • Weight
    0.45 lbs (204 grams) (VCR)
  • Compliance
    CE (Electrical Analog I/O)

Features

C-Series Communication Options

Digital I/O RS485 PROFINET® Modbus
Input Power Required 24 VDC @ (±10%), <4 watts +24 VDC (<5 watts) +24 VDC (<5 watts)
Connector 9 pin Type D male (power and comm.) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) 1 x RJ-45 (comm.) male,DC power plug
Data Rate Switch/Selection No switch
Set data rate via RS485
MFC: No switch
MFM: N/A
N/A
Comm. Rate(s) 9.6 Kbps
19.2 Kbps
38.4 Kbps
MFC: 100 Mbps
MFM: N/A
N/A
MAC ID Switches/Addresses Set address over RS485 Station Addresses 0,0 to 9,9 N/A N/A
Network Size Up to 32 nodes N/A N/A
Visual Indicators LED Power
LED Run (green)
LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)
LED Module
LED Network
Compliance CE CE CE

CMA10B Selection Guide

C-Series mass flow controllers and meters are selected based on the gas and range desired.  Use this table to determine the best model for your application:

CMA10B
Gas SEMI# Gas Symbol Minimum Full Scale Maximum Full Scale
1 He 23 16000
4 Ar 40 17000
8 Air 15 14000
13 N2 15 14000
15 O2 14 13000
110 SF6 7 4500
129 C4F8 4 2100

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