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Description
hpq3s high pressure residual gas analyzer HPQ3S Residual Gas Analyzer, 0-100 amu, 0.008 Torr Maximum Pressure

Specifications

  • Mass Range
    1-100 amu
  • Filaments
    Twin Tungsten or Thoria Coated Iridium
  • Detector
    Faraday
  • Maximum Analyzer Operating Pressure
    0.008 Torr (0.001 mbar) - Application dependent
  • Minimum Detectable Partial Pressure
    8e-11 Torr (1e-10 mbar)
  • Minimum Detectable Concentration
    5ppm at 0.001 Torr (0.0013 mbar)
  • Software
    Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software
  • Mass Stability
    ±0.1 amu over 8 hours at stable ambient
  • Resolution
    Better than 10% valley for peaks of equal height across mass range
  • Mounting Flange
    DN38CF (70mm/2.75inch OD) Conflat
  • Bake Out Temperature
    250°C with electronics removed
  • Operating Temperature
    Electronics: 10-40°C
  • Power Requirements
    24V DC, 3A external universal voltage supply (included)
  • Maximum Operating Conditions
    80% RH (non condensing)
  • Data Acquisition Method
    Dedicated real time acquisition processor
  • Data Acquisition Speed
    < 3ms per point for analog or barchart scanning
  • Data Collection Methods
    Analog scanning, partial or full mass range 8, 16 or 32 points/amu Barchart scanning, partial or full mass range Peak-jump collection of any combination of peaks at up to 15 per acquisition set
  • Communication
    10/100 Base-T Ethernet, static or automatically assigned IP addresses
  • Settling Time
    < 20ms to 1 ppm of Maximum Signal
  • Control Method
    CE operating system processor with web-server interface
  • Command Structure
    Documented SDK and ASCII command protocols
  • Filament Protection
    Dedicated x-Trip with optional pressure sensor for use with cryo-pump isolation valve.
  • Number of Stored Source Settings
    6 sets including ion source parameters, alignment, resolution, detector calibrations
  • Compliance
    CE (control unit)
  • Software Controlled Tuning Parameters
    Electron energy, 20 to 100eV Emission current, 0 to 2 mA Ion energy, 0 to 10V Ion extraction, 0 to -130V Filter pole bias, 0 to -10V to +10V

Features

RGA Technology Leadership

MKS was the first company to offer an RGA compatible with modern Ethernet based, web-enabled, wide area network installations. HPQ3 continues this development to a level that offers the highest flexibility and connectivity through the use of industry standard communication hardware and software. HPQ3 optimizes the roles required of a complex sensor by having two dedicated processors;

  • An optimized, proprietary processor for data acquisition
  • An industry standard CE operating system processor for external communications through field proven TCP-IP technology.

The advantages of this design approach are fast, accurate data from a robust RGA sensor using industry standard, flexible communication protocols. HPQ3 also provides a complete range of additional digital and analog connections for integrating into systems with flexible low cost solutions.

High Pressure Quadrupole Analyser Design

The new RF design in the HPQ3 covers the 1-100 amu mass range without compromising the quality of gas peak separation at very low mass or high mass. The field proven High Pressure Quadrupole analyser design in the HPQ3 retains the robust and inexpensive ion source design with dual filaments. This allows continuous uninterrupted operation without needing to regularly replace filaments before their normal expected lifetime. For specific higher pressure applications up to 1e-2 mbar the HPQ3S makes real-time corrections using a gauge pressure from the tool or by using a variety of optional independent gauges fitted to a custom F-Chamber designed for optimum performance with the HPQ3S.

Wide Dynamic Range Detector Electronics

Wide dynamic range and high sensitivity allow parts per million level detection even at high pressures

The patented wide dynamic range detector electronics allow detection of single figure parts per million chamber leaks or contaminants, even when simultaneously measuring major gas peaks in the e-3 mbar range. This is possible in a single scan or peak jump data acquisition with less than 20 ms between the maximum and minimum signal levels and without the need for an expensive electron multiplier which needs frequent calibration and replacement.

  • Prevents large peaks from causing false positive measurements on small peaks.
  • Temperature stabilized critical components with improved signal stability and baseline drift allow the unit to be used without frequent recalibration if the vacuum chamber is stable but ambient air temperature fluctuates
  • Variable sensor conditions to match the needs of each process under different pressure conditions
  • Each optimized sensor configuration is separately stored in the RGA and automatically recalled or recalibrated by software recipes.
  • Flexible digital and analog I/O capability with a dedicated gauge port as standard.

Built-in Web Server Application

A web interface using industry standard technology allows set-up and control of the HPQ3 from anywhere on a network. Using a non platform-specific web browser, calibration, operation and saving real time data to an export format is all possible. Using the documented Software Developer’s Kit, ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the HPQ3 and HPQ3S.

Built-in web application for HPQ3 control and data acquisition

Process Eye Professional

A Windows-based comprehensive software platform offering complete control of all RGA parameters:

  • Recipe driven control to allow the highest level of flexibility but with ease of use through the EasyView recipe and Recipe Wizard
  • Ability to link to other systems through a variety of mechanisms such as Modbus, ASCII, SECS protocols, serial communications, TCP-IP, file exchange and many others
  • Flexibility to run automatic and precisely-optimized data collection, alarm condition checking and closed loop control operation

Process Eye Professional for flexible control through recipe-driven data collection

TOOLweb® RGA

A specialized, turn-key tool-integration software package (PC or server based) providing optimized methods to get the most reliable information from RGAs and other sensors on process tools:

  • Complete integration of RGA data with tool operation and FDC systems
  • Levels of interdiction from passive monitoring of the tool vacuum, to process critical go/stop control of individual process chambers
  • Powerful web based reporting provides process engineers with highly valuable information to keep tools running at peak efficiency from anywhere on the network

TOOLweb RGA for complete integration with tool and factory process control

Resources

Literature

Drawings & CADs

Technical Notes

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