148J All-metal Flow Control Valve

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Overview

The 148J All Metal Control Valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10^-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C.

316 S.S, Nickel, Elgiloy, KM45, Teflon
10 to 30,000 sccm full scale flow ranges
4 VCR® male fittings
Bakeable to 150°C

Products

Compare	Description	Compatibility	rankScore	Full Scale Flow Range	Availability	Price
148JA11CR1M Upstream Flow Control Valve, 10 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA11CR1M Upstream Flow Control Valve, 10 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	10 sccm	4 Weeks	$2,316
148JA12CR1M Upstream Flow Control Valve, 100 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA12CR1M Upstream Flow Control Valve, 100 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	100 sccm	4 Weeks	$2,316
148JA13CR1M Upstream Flow Control Valve, 1000 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA13CR1M Upstream Flow Control Valve, 1000 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	1000 sccm	4 Weeks	$2,316
148JA14CR1M Upstream Flow Control Valve, 10000 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA14CR1M Upstream Flow Control Valve, 10000 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	10000 sccm	4 Weeks	$2,316
148JA21CR1M Upstream Flow Control Valve, 20 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA21CR1M Upstream Flow Control Valve, 20 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	20 sccm	4 Weeks	$2,316
148JA22CR1M Upstream Flow Control Valve, 200 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA22CR1M Upstream Flow Control Valve, 200 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	200 sccm	4 Weeks	$2,316
148JA23CR1M Upstream Flow Control Valve, 2000 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA23CR1M Upstream Flow Control Valve, 2000 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	2000 sccm	4 Weeks	$2,316
148JA24CR1M Upstream Flow Control Valve, 20000 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA24CR1M Upstream Flow Control Valve, 20000 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	20000 sccm	4 Weeks	$2,316
148JA51CR1M Upstream Flow Control Valve, 50 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA51CR1M Upstream Flow Control Valve, 50 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	50 sccm	4 Weeks	$2,316
148JA52CR1M Upstream Flow Control Valve, 500 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA52CR1M Upstream Flow Control Valve, 500 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	500 sccm	4 Weeks	$2,316
148JA53CR1M Upstream Flow Control Valve, 5000 sccm Nitrogen, 4 VCR Male Fitting $2,316 4 Weeks	148JA53CR1M Upstream Flow Control Valve, 5000 sccm Nitrogen, 4 VCR Male Fitting	UNIVERSAL	1.0	5000 sccm	4 Weeks	$2,316