148J All-metal Flow Control Valve
148J All-metal Flow Control Valve
The 148J All Metal Control Valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion.
- 316 S.S, Nickel, Elgiloy, KM45, Teflon
- 10 to 30,000 sccm full scale flow ranges
- 4 VCR® male fittings See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | 148JA11CR1MUpstream Flow Control Valve, 10 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA12CR1MUpstream Flow Control Valve, 100 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA13CR1MUpstream Flow Control Valve, 1000 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA14CR1MUpstream Flow Control Valve, 10000 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA21CR1MUpstream Flow Control Valve, 20 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA22CR1MUpstream Flow Control Valve, 200 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA23CR1MUpstream Flow Control Valve, 2000 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA24CR1MUpstream Flow Control Valve, 20000 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA51CR1MUpstream Flow Control Valve, 50 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks | ||||
| 148JA52CR1MUpstream Flow Control Valve, 500 sccm Nitrogen, 4 VCR Male Fitting | 4 Weeks |
Specifications
- Type148J All-metal Flow Control Valve
- Full Scale Flow Range10 - 30,000 sccm
- Minimum Controllable Flow2% Full Scale
- Closed Conductance Leakage<1% Full Scale (15 psid to atm)
- Exposed Materials316 S.S, Nickel, Elgiloy, KM45, Teflon
- Seal MaterialMetal
- Fitting Type4 VCR® male compatible
- Operating Temperature10-60°C
- ComplianceCE
(For CE compliance an overall metal braided shielded cable, properly grounded at both ends, must be used.)
Resources
Manuals
148J Pressure Control Valve User Manual(267 kB, PDF)
Drawings & CADs
148J Control Valve Model File(1.2 MB, STP)
