The 148J All Metal Control Valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C.
Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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148JA11CR1M Upstream Flow Control Valve, 10 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA12CR1M Upstream Flow Control Valve, 100 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA13CR1M Upstream Flow Control Valve, 1000 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA14CR1M Upstream Flow Control Valve, 10000 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA21CR1M Upstream Flow Control Valve, 20 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA22CR1M Upstream Flow Control Valve, 200 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA23CR1M Upstream Flow Control Valve, 2000 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA24CR1M Upstream Flow Control Valve, 20000 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA51CR1M Upstream Flow Control Valve, 50 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA52CR1M Upstream Flow Control Valve, 500 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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148JA53CR1M Upstream Flow Control Valve, 5000 sccm Nitrogen, 4 VCR Male Fitting |
4 Weeks
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$2,316 |
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