The 148JA23CR1M All Metal Flow Control Valve features a full scale range of 2,000 sccm of Nitrogen, a Swagelok® 4 VCR® male fitting, and all metal seals. The 148J valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C.
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148JA23CR1M - Drawings
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148JA23CR1M
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Upstream Flow Control Valve, 2000 sccm Nitrogen, 4 VCR Male Fitting