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154B High Flow Control Valve
154B High Flow Control Valve
The MKS Instruments 154 High Flow Control Valve offers better response time as compared to other high flow control valves. This is possible through the use of a "balanced forces" design that automatically neutralizes the pressure-induced imbalances within the valve. The elastomer-sealed 154 valve is designed for flow rates from 0.2 to 200 slm.
Specifications
- Type154B High Flow Control Valve
- Full Scale Flow Range20 - 200 slm
- Minimum Controllable Flow0.1% of Full Scale
- Closed Conductance Leakage<0.1% of Full Scale (15 psid to atm)
- Exposed MaterialsStandard: 316 S.S., Nickel, Viton®
Optional: Buna-N, Kalrez®, Neoprene® - Seal MaterialElastomer
- Fitting TypeStandard: 1/2 inch Swagelok®
Optional: 8 VCR or 8 VCO® male - Operating Temperature-10 to 60°C
Resources
Literature
154B Solenoid Control Valve(1.6 MB, PDF)
