The 148JA52CR1M All Metal Flow Control Valve features a full scale range of 500 sccm of Nitrogen, a Swagelok® 4 VCR® male fitting, and all metal seals. The 148J valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C.