The PPCMA pressure controller with integrated mass flow meter provides pressure measurement and control while monitoring mass flow rates for critical process applications (e.g. backside wafer cooling) in a compact package that saves critical space when compared to the previous multi-component systems needed to accomplish the task. The PPCMA utilizes leading Baratron® capacitance manometer technology for pressure measurement and patented thermal flow meter to monitor gas mass flow. Both are integrated along with a proportioning control valve and the latest in control electronics for fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PPCMA can be configured for 5 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. The valve and flow meter can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions. The PPCMA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device's micro USB user interface accessible via virtually any PC with a web browser.