PPCA High Performance Pressure Control Valve with Integrated Controller
Overview
The PPCA pressure controller provides pressure measurement and control for critical process applications such as backside wafer pressure control, transport chamber pressure control and process gas panel pressure balancing. The device may be configured for either upstream (inlet) or downstream (outlet) pressure control. This is accomplished in a compact package that saves critical space when compared to the previous multi-component systems necessary to accomplish the task.
The PPCA utilizes leading Baratron® capacitance manometer technology for pressure measurement from MKS Instruments. It is integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PPCA can be configured for 10 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. This configurability makes the device suitable for transport chamber pressure control, critical backside wafer pressure control as well as run-vent pressure control applications. The control valve can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.
The PPCA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s micro USB user interface accessible via virtually any PC with a web browser.
- Backside wafer cooling
- Fast response to set point with minimal overshoot
- Metal-sealed, cleanroom manufactured units meet critical high purity application needs
- Temperature compensation maintains device accuracy over its operating temperature range
Products
Configuration Options
The following options are available for PPCA Pressure Controllers
Ordering Code Example: PPCAA51TR8ADV1020
| Configuration Option | Option Code |
|---|---|
|
PPCA Pressure Controller |
PPCA |
Sensor Type |
|
| Absolute | A |
Pressure Range Full Scale & Units |
|
| 10 Torr | 11T |
| 20 Torr | 21T |
| 50 Torr | 51T |
| 100 Torr | 12T |
| 200 Torr | 22T |
| 500 Torr | 52T |
| 1000 Torr | 13T |
| 100 mBar | 12M |
| 500 mBar | 52M |
| 1000 mBar | 13M |
| 1 kPa | 10K |
| 5 kPa | 50K |
| 10 kPa | 11K |
| 100 kPa | 12K |
Fittings |
|
| Swagelok 4 VCR | R |
Communications |
|
| DeviceNet | 6 |
| EtherCAT | 8 |
Orifice Size |
|
| A (50 sccm) | A |
| #1 (200 sccm) | 1 |
| #2 (1000 sccm) | 2 |
| #3 (5000 sccm) | 3 |
| #4 (10000 sccm) | 4 |
| #5 (20000 sccm) | 5 |
| #6 (30000 sccm) | 6 |
| #7 (50000 sccm) | 7 |
Pressure Control |
|
| Upstream (inlet) | U |
| Downstream (outlet) | D |
Plug Material |
|
| Buna N/NC | B1 |
| EPDM/NC | E1 |
| Neoprene/NC | N1 |
| Teflon/NC | T1 |
| Viton/NC | V1 |
Reserved |
|
| Standard | 0 |
Firmware |
|
| DeviceNet | 10 |
| EtherCAT | 20 |
Specifications
-
TypePPCA Absolute Pressure Controller
-
Pressure Range10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale
-
Fitting TypeSwagelok® 4 VCR Male
-
Valve PositionNormally Closed
-
Valve SeatPTFE (Teflon®) or Elastomer (Viton®), Buna-N, Neoprene, EPDM
-
Flow Rate50, 200, 1000, 5000, 10000, 20000, 30000, 50000 (sccm)
-
Pressure Readout UnitsTorr, kPa, mbar
-
Pressure Resolution0.1 Torr
-
Pressure Control Accuracy±1.0% of Reading (≥10% Full Scale)
±0.2% of Full Scale (<10% Full Scale) -
Transducer Over Pressure Limit2x Full Scale for all ranges
-
Maximum Differential Pressure45 psid
-
Burst Pressure1500 psig
-
Control ModeUpstream or Downstream
-
Pressure Measurement Accuracy±0.5% of Reading
-
Zero Temperature Coefficient±0.02% of Full Scale/°C
-
Span Temperature Coefficient±0.04% of Reading/°C
-
Control Range>5 to 100% of Full Scale
-
Typical Response Time<1.0 second (excluding system time constant)
-
Operating Temperature10 to 50°C (50 to 122°F)
-
Storage Temperature-20 to 80°C (minus 4 to176°F)
-
Storage Humidity0 to 95% Relative Humidity, non-condensing
-
External Leak Integrity<1 x 10-10 (scc/sec He)
-
Leak Integrity Through Closed Valve<1.0% of orifice Full Scale
(Nitrogen at 25 psig on inlet to atmosphere)
<0.1% of orifice Full Scale - Elastomer -
Wetted MaterialsStandard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45, Inconel® 718, 825 Incoloy®
Optional: (Valve Seat) PTFE (Teflon) or Elastomer (Viton) -
Surface Finish<10 µinches, average Ra electropolished
-
Power RequiredDeviceNetâ„¢: +11 to +25 VDC per (<4 watts)
EtherCAT®: +24 VDC (<5 watts) -
Connector-InterfaceDeviceNetâ„¢: 5 pin micro connector (power and comm.)
EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) -
Data Rate SwitchDeviceNetâ„¢: 4 positions: 125, 250, 500K (Default), (programmable over network)
EtherCAT®: No switch -
EtherCAT Communication Rate100 Mbps
-
DeviceNet Communication Rate125 Kbps, 250 Kbps, 500 Kbps
-
MAC ID SwitchesDeviceNetâ„¢: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
EtherCAT®: 3 switches, 16 positions -
Network SizeDeviceNetâ„¢: Up to 64 nodes
EtherCAT®: Up to 4095 nodes -
IndicatorsDeviceNetâ„¢: LED Network (green/red), LED Module (green/red)
EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green) -
Weight<3 lbs (1.36 kg)
-
ComplianceCE
Resources
Literature
- PPCA Pressure Controller (293.9 kB, PDF)
Drawings & CADs
- PPCA Dimensional Drawing (201.9 kB, PDF)
- PPCA Pressure Controller 3D Model Files
Manuals
- PPCA/PPCMA Manual (2 MB, PDF)
- PPCA/PPCMA DeviceNetâ„¢ Profile (572.1 kB, PDF)
- P-Series EtherCAT Supplement Manual (1080037-001) (296.4 kB, PDF)
Device Description Files
- MKS PPCA ESI File (170.5 kB, XML)
- MKS PPCA EDS File (74.7 kB, EDS)
Ultra-High Velocity