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Description
gpca/gpcma pressure controller GPCMA Absolute Pressure Controller, General Purpose, Mass Flow Controller, Metal-sealed

Specifications

  • Type
    GPCMA Absolute Pressure Controller with Mass Flow Meter
  • Pressure Range
    500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale
  • Fitting Type
    Swagelok® 4 VCR Male
    1-1/8 inch surface mount (C-seal, W-seal)
    1/4 inch Swagelok compression seal
  • Valve Position
    Normally Closed
  • Valve Seat
    PTFE (Teflon®)
  • Flow Rate
    5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000, 50000 (N2 equivalent)
  • Pressure Readout Units
    Torr, kPa, psi, mbar
  • Pressure Resolution
    0.1 Torr
  • Pressure Control Accuracy
    ±1.0% of Reading >20% Full Scale
    ±0.2% of Full Scale <20% of Full Scale Flow (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
  • Transducer Over Pressure Limit
    2x Full Scale for all ranges
  • Maximum Differential Pressure
    45 psid
  • Burst Pressure
    1500 psig
  • Control Mode
    Downstream
  • Pressure Measurement Accuracy
    ±0.5% of Reading
  • Zero Temperature Coefficient
    ±0.02% of Full Scale/°C
  • Span Temperature Coefficient
    ±0.04% of Reading/°C
  • Control Range
    >2 to 100% of Full Scale
  • Typical Response Time
    <1.0 second
  • Operating Temperature
    10-50°C (50-to 122°F)
  • Storage Temperature
    -20-80°C (-4-176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
  • Flow Measurement Range
    2% to 100% of Full Scale
  • Flow Repeatability
    ±0.3% of Reading
  • Flow Resolution
    0.1% of Full Scale
  • Flow Accuracy
    ±1.0% of Reading >20% of Full Scale
    ±0.2% of Full Scale (>20% of Full Scale flow)
    (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
  • Flow Span Temperature Coefficient
    <0.08% of Reading/°C
  • Flow Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Wetted Materials
    Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45
    Optional: PTFE (Teflon) Valve Seat
  • Surface Finish
    <10 µinches, average Ra electropolished
  • Power Required
    DeviceNetâ„¢: +11 to +25 VDC per (<4 watts)
    EtherCAT®: +24 VDC (<5 watts)
    RS485: +15 to +24 VDC(<4 watts)
  • Connector-Interface
    DeviceNetâ„¢: 5 pin micro connector (power and comm.)
    EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
    RS485: 9 pin Type D male (power and comm.)
  • Data Rate Switch
    DeviceNetâ„¢: 4 positions: 125, 250, 500K (Default), (programmable over network)
    EtherCAT®: No switch
    RS485: No switch (set data rate via RS485)
  • EtherCAT Communication Rate
    100 Mbps
  • DeviceNet Communication Rate
    125 Kbps, 250 Kbps, 500 Kbps
  • RS485CommunicationRate
    9.6 Kbps,19.2 Kbps,38.4 Kbps
  • MAC ID Switches
    DeviceNetâ„¢: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
    EtherCAT®: 3 switches, 16 positions
    RS485: Set address over RS485, Station Addresses 0,0 to 9,9
  • Network Size
    DeviceNetâ„¢: Up to 64 nodes
    EtherCAT®: Up to 4095 nodes
    RS485: Up to 32 nodes
  • Indicators
    DeviceNetâ„¢: LED Network (green/red), LED Module (green/red)
    EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
    RS485: LED Comm (yellow),LED Error (red)
  • Weight
    <3 lbs (1.36 kg)
  • Compliance
    CE

Features

Digital I/O

The GPCMA digitally controlled pressure controller is available with digital I/O (EtherCAT®, DeviceNet™ or RS485). The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are less than 1 second dependent on installation conditions. Included is a digital calibration that yields 1% of set point accuracy.

High Purity Applications

The GPCMA, with 4 VCR® fittings, is 1.125'' (28.6 mm) wide and 4.88'' (124 mm overall) length allowing it to fit in standard gas systems. It is also available with the 1.125'' (38.6 mm) IGS compatible c-seal and w-seal configurations. The GPCMA metal-sealed, pressure controller with its 10 microinch, electropolished surface finish is well suited for use in high purity process applications. The GPCMA is available with a normally closed valve.

Resources

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