Configuration Options

 Show All Configuration Options
Description
ppcma downstream pressure controller with mass flow meter PPCMA Integrated Pressure Controller, Mass Flow Meter, PPCMA

Specifications

  • Type
    PPCMA Absolute Pressure Controller with Mass Flow Meter
  • Pressure Range
    5, 10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale
  • Fitting Type
    Swagelok® 4 VCR® Male
    1.5 inch surface mount (C-seal)
  • Valve Position
    Normally Closed
  • Valve Seat
    PTFE (Teflon®), Elastomer (Viton®), Buna, Neoprene, EPDM
  • Flow Rate
    5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 (N2 equivalent)
  • Pressure Readout Units
    Torr, kPa, mBar, psi
  • Pressure Resolution
    0.1 Torr
  • Pressure Control Accuracy
    ±1.0% of Reading (≥10% Full Scale)
    ±0.2% of Full Scale (<10% Full Scale)
  • Transducer Over Pressure Limit
    2x Full Scale for all ranges
  • Maximum Differential Pressure
    45 psid
  • Burst Pressure
    1500 psig
  • Control Mode
    Downstream
  • Pressure Measurement Accuracy
    ±0.5% of Reading
  • Zero Temperature Coefficient
    ±0.02% of Full Scale/°C
  • Span Temperature Coefficient
    ±0.04% of Reading/°C
  • Control Range
    >5 to 100% of Full Scale
  • Typical Response Time
    <1.0 second (excluding system time constant)
  • Operating Temperature
    10-50°C (50 to 122°F)
  • Storage Temperature
    -20 to 80°C (-4 to 176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of orifice Full Scale
    (Nitrogen at 25 psig on inlet to atmosphere)
    (Nitrogen at 25 psig on inlet to atmosphere)
    <0.1% of orifice Full Scale - Elastomer
  • Flow Measurement Range
    2% to 100% of Full Scale
  • Flow Repeatability
    ±0.3% of Reading
  • Flow Resolution
    0.1% of Full Scale
  • Flow Accuracy
    ±1.0% of Reading >20% of Full Scale; ±0.2% of Full Scale (<20% of Full Scale flow)
    (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
  • Flow Span Temperature Coefficient
    Span: <0.08% of Reading/°C
  • Flow Zero Temperature Coefficient
    Zero: <0.05% of Full Scale/°C
  • Wetted Materials
    Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45, Inconel® 718, 825 Incoloy®
    Optional: PTFE (Teflon) or Elastomer (Viton)
  • Surface Finish
    <10 µinches, average Ra electropolished
  • Power Required
    DeviceNetâ„¢: +11 to +25 VDC per (<4 watts)
    EtherCAT®: +24 VDC (<5 watts)
  • Connector-Interface
    DeviceNetâ„¢: 5 pin micro connector (power and comm.)
    EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
  • Data Rate Switch
    DeviceNetâ„¢: 4 positions: 125, 250, 500K (Default), (programmable over network)
    EtherCAT®: No switch
  • EtherCAT Communication Rate
    100 Mbps
  • DeviceNet Communication Rate
    125 Kbps, 250 Kbps, 500 Kbps
  • MAC ID Switches
    DeviceNetâ„¢: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
    EtherCAT®: 3 switches, 16 positions
  • Network Size
    DeviceNetâ„¢: Up to 64 nodes
    EtherCAT®: Up to 4095 nodes
  • Indicators
    DeviceNetâ„¢: LED Network (green/red), LED Module (green/red)
    EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
  • Weight
    <5 lbs (1.36 kg)
  • Compliance
    CE

Features

Applications

The PPCMA can be configured for 10 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. The PPCMA pressure controller is suitable for transport chamber pressure control, critical backside wafer pressure control and process gas panel pressure balancing as well as run-vent pressure control applications. The valve and flow meter can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.

Digital I/O

The PPCMA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s micro USB user interface accessible via virtually any PC with a web browser.

Resources

Need help?

Contact an Applications Specialist by sending us an email