Sorry, this family of products is no longer available. For recommended replacements see upstream-pressure-controllers.

Dual-Zone Pressure Controllers with Mass Flow Meter

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dual-zone pressure controller with mass flow meter

Overview

The Dual-Zone Pressure Controller (DPC) is a highly integrated closed-loop pressure control subsystem. It consists of an inlet pneumatic shut-off valve, two independent channels of pressure control with mass flow metering, and a vacuum outlet. Each pressure control channel of the DPC Dual-Zone Pressure Controller consists of a pressure sensor, a control valve, and a mass flow meter.

Specifications

Type

Dual Pressure Controller
Control Method

Absolute pressure capacitance manometer
Pressure Range

10, 20, 50, 100 Torr
Fitting Type

Swagelok® 4 VCR® male compatible
Pressure Control Accuracy

±0.5% of Reading
Transducer Over Pressure Limit

45 psia or 200% Full Scale, whichever is greater
Control Mode

Analog Integral Adjustments: 10 positions (0 through 9)
Analog Proportional Adjustments: 10 positions (0 through 9)
Zero Temperature Coefficient

Pressure: ≤0.02% Full Scale/°C
Flow: ≤0.05% Full Scale/°C
Span Temperature Coefficient

Pressure: ≤0.04% Reading/°C
Flow: ≤0.08% Reading/°C
Control Range

10-100% Full Scale
Operating Temperature

15 to 50°C (59 to 122°F)
Storage Temperature

-20 to 80°C (-4 to 176°F)
Storage Humidity

0 to 95% Relative Humidity, non-condensing
External Leak Integrity

<10^-9 scc/sec He
Leak Integrity Through Closed Valve

<1% Full Scale
Flow Measurement Range

10, 20, 50, 100 sccm

Maximum Inlet Pressure

45 psia
Flow Accuracy

±1.0% of Full Scale
Wetted Materials

316L Stainless Steel, Inconel®, Nickel, Elgiloy®, Viton®
Surface Finish

Ra ≤10 µinches, electropolished
Set Point

Stability: ≤0.1% set point
Control Time to Set Point: ≤2.0 seconds (typical)
Power Required

DeviceNet: 11-25 VDC
Analog: ±15 VDC ±5%, 500 mA, maximum during first five seconds at start up, 400 mA at steady state
Connector-Interface

DeviceNet: 5-pin sealed microconnector with DeviceNet pin assignments
Analog: 15 pin D male (one per channel)
DeviceNet Communication Rate

125 - 500 Kbps (user selectable)
MAC ID Switches

DeviceNet: 2, one for each pressure control channel (4 MAC ID switches)
Indicators

DeviceNet: LED Network Status (green/red) LED Module Status (green/red)
Meter Warm-up Time

1 hour
Stability at set point

<0.1% set point
Input-Output Signals

Analog Output: 0 to 5 VDC (flow), 0 to 10 VDC (pressure)
Analog Pressure Set Point Input: 0 to 10 VDC
Cable Length

100 feet (maximum)
Weight

10.5 lbs. (4.8 Kg)
Dimensions

10.46 in (including fittings) x 3.36 in x 5.35 in
26.56 cm (including fittings) x 8.53 cm x 13.59 cm