DA02B 0.1-1000 Torr Heated & Unheated Baratron® Capacitance Manometers with EtherCAT®
Model: DA02B
DA02B 0.1-1000 Torr Heated & Unheated Baratron® Capacitance Manometers with EtherCAT®
Model: DA02B
Overview
Overview
The DA02B e-Baratron® EtherCAT® Capacitance Manometer continues that progression of high performance into networked systems, using industry-standard EtherCAT digital communications to connect to complex process tools. Based on the proven 627 and 628 Ethernet-equipped e-Baratron products, the EtherCAT e-Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems. It uses the exact same Inconel®-based capacitance sensor as current MKS Baratron manometer products, offering the same long lifetime, low maintenance, and high corrosion resistance as current analog Baratron capacitance manometers. It is available in three different operating temperatures (45°, 80°, or 100°C), eleven different Full Scale measurement ranges from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa), and ten different connection fittings for use in nearly any application or process.
Technical Specs
- TypeVacuum/pressure Transducer
- Sensor TypeShort tube deposition/etch/fluorine friendly sensor
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range500 Torr
- Accuracy0.15% of Reading
- Fitting TypeNW25 ISO-KF
- Communication ProtocolEtherCAT
- Analog Output0-10 VDC
- Analog Connector15-pin D-sub
- Digital Connector2 RJ45 EtherCAT jacks
- Zero Temperature Coefficient45°C Models: 0.002% of Full Scale/°C for ranges ≥1 Torr, 0.005% of Full Scale/°C for ranges <1 Torr, 80 and 100°C Models: 0.002% of Full Scale/°C for ranges ≥1 Torr, 0.010% of Full Scale/°C for ranges <1 Torr
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range45°C Models: 15 - 40°C, 80 and 100°C Models: 15 - 50°C
- Calibration OrientationHorizontal
- Volume6.3 cc
- Warm-up Time4 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel® and Incoloy® nickel alloys, optional fittings may be built from 300-series stainless steel.
- Power Requirements+24 VDC ±10% (Unheated 300mA, 45°C Models 600 mA, 80° and 100°C Models 800 mA)
±15VDC ±5% (Unheated 300mA, 45°C Models 600 mA, 80° and 100°C Models 800 mA) - Trip PointsTrip A below 50%, Trip B below 50% of Full Scale Range
- UnitskPa
- ComplianceCE
Technical Specs
- TypeVacuum/pressure Transducer
- Sensor TypeShort tube deposition/etch/fluorine friendly sensor
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range500 Torr
- Accuracy0.15% of Reading
- Fitting TypeNW25 ISO-KF
- Communication ProtocolEtherCAT
- Analog Output0-10 VDC
- Analog Connector15-pin D-sub
- Digital Connector2 RJ45 EtherCAT jacks
- Zero Temperature Coefficient45°C Models: 0.002% of Full Scale/°C for ranges ≥1 Torr, 0.005% of Full Scale/°C for ranges <1 Torr, 80 and 100°C Models: 0.002% of Full Scale/°C for ranges ≥1 Torr, 0.010% of Full Scale/°C for ranges <1 Torr
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range45°C Models: 15 - 40°C, 80 and 100°C Models: 15 - 50°C
- Calibration OrientationHorizontal
- Volume6.3 cc
- Warm-up Time4 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel® and Incoloy® nickel alloys, optional fittings may be built from 300-series stainless steel.
- Power Requirements+24 VDC ±10% (Unheated 300mA, 45°C Models 600 mA, 80° and 100°C Models 800 mA)
±15VDC ±5% (Unheated 300mA, 45°C Models 600 mA, 80° and 100°C Models 800 mA) - Trip PointsTrip A below 50%, Trip B below 50% of Full Scale Range
- UnitskPa
- ComplianceCE
Resources & Downloads
Drawings & CADs
DA02 Baratron® Capacitance Manometer Dimensional Drawings(131.9 kB, PDF)