DA05A Heated Baratron® Capacitance Manometer with EtherCAT® for Full Scale Pressures <1 Torr/mbar
Overview
The DA05A Baratron® Capacitance Manometer is the next generation EtherCAT® manometer from MKS, the industry leader in capacitance manometer pressure gauges.
The DA05A builds off the same Inconel® sensor as the industry and process proven MKS 600 Series and DA02 Baratron Capacitance Manometer, resulting in long life, low maintenance, exceptional corrosion resistance, and high maximum overpressure limit. The manometer is equipped with a 1 ms EtherCAT® communication refresh rate, 12 ms nominal pressure response time, extensive use of automotive grade electronics, and an extended maximum ambient operating temperature of 60°C. The advanced electronics in the DA05A also provides an improved signal to noise ratio and faster response time than the industry-standard DA02. Further, the resolution and response of both the analog and digital pressure signal can be user optimized for the specific application through adjustment of the programmable filter setting.
Available with the standard MKS sensor or optional proprietary etch/fluorine/deposition friendly sensor for enhanced stability and reduced process induced zero drift in critical etch or deposition applications.
See the DA07A for Full Scale pressures 1 Torr/mbar and greater.
- Improved signal-to-noise ratio and configurable filtering allows full optimization of noise floor and response time.
- Inconel-based sensor offers superior corrosion resistance enabling longer lifetime under extreme process conditions
- High maximum overpressure limit of 45 PSIA, protects the sensor from permanent damage from high pressure excursions
- Excellent long-term stability reduces maintenance needs
- Optional etch/fluorine/deposition friendly sensor minimizes process byproduct induced zero drift
Products
Configuration Options
The following options are available for DA05A Baratron® Heated Capacitance Manometers
Ordering Code Example: DA05A.1TCES24BAA0V0
| Configuration Option | Option Code |
|---|---|
| DA05A Heated Capacitance Manometers | DA05A |
Full Scale Range |
|
| 0.1 | .1 |
| 0.25 | RE |
Units of Measurement |
|
| Torr | T |
| mbar | M |
Fittings |
|
| 0.5 in. OD tube | BA |
| 8 VCR female | CE |
| 8 VCR male | CF |
| 8 VCR female, short tube | CR |
| NW16 ISO-KF | GA |
| 1.33 in. OD CF | HA |
Sensor Type |
|
| Standard sensor, standard inlet tube length | S |
| Standard sensor, reduced inlet tube length (use with fitting code CR) | T |
| Deposition/etch/fluorine friendly sensor | L |
| Short tube deposition/etch/fluorine friendly sensor (use with fitting code CR) | M |
Input/Output Voltages |
|
| ±15 VDC input, 0-10 VDC analog output | 2 |
| 24 VDC input, 0-10 VDC analog output | 3 |
Sensor Temperature |
|
| 45°C | 4 |
| 80°C | 8 |
| 100°C | 1 |
Electrical Connector |
|
| 15-pin D-subminiature male connector with screw lock | B |
| 15-pin D-subminiature male connector with slide lock | P |
Trip Points |
|
| None | 00 |
| Trip A above 50%, Trip B above 50% of Full Scale Range | AA |
| Trip A above 50%, Trip B below 50% of Full Scale Range | AB |
| Trip A below 50%, Trip B below 50% of Full Scale Range | BB |
| Trip A below 50%, Trip B above 50% of Full Scale Range | BA |
Reserved |
|
| Reserved | 0 |
Calibration Orientation |
|
| Vertical | V |
| Horizontal | H |
Accuracy |
|
| Standard accuracy | 0 |
| Notes: See DA07A product for pressure ranges 1 Torr/mbar or greater. Custom Part numbers can be requested for copy exact applications. Standard part numbers will ship with the latest firmware at the date of manufacture. A custom part number should be requested for locked firmware/EtherCAT ESI file. |
|
Specifications
-
TypeVacuum/pressure Transducer
-
Measurement TypeAbsolute
-
Sensor TemperatureControlled to 45°C, 80°C or 100°C
-
Full Scale Pressure Ranges0.10, 0.25 Torr (100, 250 mTorr)
-
Accuracy45°C: 0.15% Reading for ranges <1 Torr, 0.10% of Reading for ranges =1 Torr
80°C & 100°C: 0.50% of Reading for ranges <1 Torr, 0.25% of Reading for ranges =1 Torr -
Resolution0.001% Full Scale
-
Response TimePressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
EtherCAT Update Rate:Refresh Rate 1 ms -
Fitting Type0.5 in. (12 mm) OD tube
8 VCR® male or female compatible
NW16KF
1.33 in. (34 mm) OD CF -
Output SignalAnalog: 0-10 VDC into >10 kΩ load
Digital: EtherCAT -
Electrical ConnectorAnalog:15-pin D-subminiature male
EtherCAT: Two RJ45 female receptacles for incoming and network signals -
Zero Temperature Coefficient45°C: 0.005% Full Scale/°C for ranges <1 Torr, 0.002%% Full Scale/°C for ranges =1 Torr
80°C & 100°C: 0.010% Full Scale/°C for ranges <1 Torr, 0.002% Full Scale/°C for ranges =1 Torr
-
Span Temperature Coefficient0.02% Reading/°C
-
Operating Temperature Range45°C: 15-40°C
80°C & 100°C: 15-60°C -
Volume6.3 cm3 for 0.5 in. OD tube fitting.
Volumes with other fitting available on request -
Warm-up Time4 hours nominal
-
Overpressure Limit45 psia (310 kPa)
-
Materials Exposed to Process GasesInconel and Incoloy nickel alloys
(Fittings are made from 300 series stainless steel) -
Power Requirements45°C: +24 VDC ±10% @ 560 mA, ±15 VDC @ 480 mA
80°C & 100°C: +24 VDC ±10% @ 800 mA, ±15 VDC @ 700 mA -
Output RelaysStandard:Two solid state relays for "sensor ready" and "device fault" status.
Optional:Two optional internally mounted process pressure trip relays, solid state, independently adjustable through EtherCAT by customer at atmospheric pressure from 0.5% to 100% of Full Scale range.
(Relay capacity of 0.375 amps @ 30 VDC. Complies with UL1577 requirements) -
IndicatorsMulticolor status LED and two (2) red/green LEDs for EtherCAT communications status
-
ComplianceEU27: CE
United Kingdom: UKCA
US: FCC 15B
Canada: CAN ICES-3(B)/NMB-3(B)
Australia: AS CISPR11
South Korea: KC
Japan: JIS C 61326-1
Taiwan: CNS 13803
EtherCAT: ETG.5003.2080 S (R) V1.30 Vacuum Pressure Gauge
Resources
Literature
- DA05A Baratron® EtherCAT Capacitance Manometer (2 MB, PDF)
Drawings & CADs
- DA05A Baratron® Capacitance Manometer Dimensional Drawing (818.9 kB, PDF)
Manuals
- DA05A Pin-outs (41.4 kB, PDF)
- DA05A Baratron Capacitance Manometer Manual (1.4 MB, PDF)
Other
- EU 27 Declaration of Conformity for MKS Direct Pressure Products (120.3 kB, PDF)
Ultra-High Velocity