Technical Specs

  • Type
    Vacuum/pressure Transducer
  • Sensor Type
    Standard sensor, standard inlet tube length
    Short tube, standard sensor
    Etch/fluorine/deposition/friendly sensor
    Short tube etch/fluorine/deposition friendly sensor
  • Sensor Temperature
    80°C
  • Full Scale Range
    1.0 Torr
  • Fitting Type
    1.33' in. OD CF (rotatable)
  • Electrical Connector
    15-pin D-subminiature male connector with slide lock
  • Trip Points
    Trip A below 50%, Trip B above 50% of Full Scale Range
  • Units
    Torr absolute

Technical Specs

  • Type
    Vacuum/pressure Transducer
  • Sensor Type
    Standard sensor, standard inlet tube length
    Short tube, standard sensor
    Etch/fluorine/deposition/friendly sensor
    Short tube etch/fluorine/deposition friendly sensor
  • Sensor Temperature
    80°C
  • Full Scale Range
    1.0 Torr
  • Fitting Type
    1.33' in. OD CF (rotatable)
  • Electrical Connector
    15-pin D-subminiature male connector with slide lock
  • Trip Points
    Trip A below 50%, Trip B above 50% of Full Scale Range
  • Units
    Torr absolute

Resources & Downloads

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