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Description
DA07A Unheated & Heated Absolute Baratron® Digital Capacitance Manometer w/EtherCAT®

Specifications

  • Type
    Vacuum/pressure Transducer
  • Measurement Type
    Absolute
  • Sensor Temperature
    Unheated or Controlled to 45°C, 80°C, or 100°C
  • Full Scale Pressure Ranges
    1, 2, 10, 20, 100, 200, 500, 1000 Torr or mbar
  • Accuracy
    Unheated: 0.25% of Reading
    45°C: 0.10% of Reading
    80°C & 100°C: 0.25% of Reading
    Includes non-linearity, hysteresis, and non-repeatability.
    Accuracy specification and NIST-traceable calibration points included on calibration sheet are from Full Scale to 10% of Full Scale.
  • Resolution
    0.001% Full Scale
    Theoretical resolution under ideal laboratory conditions. Actual resolution in service is usually determined by system design factors not under MKS’s control.
  • Response Time
    Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
    EtherCAT Update Rate: Refresh Rate 1 ms
  • Fitting Type
    0.5 in. OD tube
    8 VCR (compatible) female
    8 VCR (compatible) male
    8 VCR (compatible) female, short tube
    NW16 ISO-KF
    1.33 in. OD CF (rotatable)
  • Output Signal
    Analog: 0-10 VDC into >10 kΩ load
    Digital: EtherCAT
  • Electrical Connector
    Analog: 15-pin D-subminiature male
    EtherCAT: Two (2) RJ45 female receptacles for incoming and network signals
  • Zero Temperature Coefficient
    Unheated:
    0.015% Full Scale/°C for 1 Torr
    0.010% Full Scale/°C for 2 Torr
    0.005% Full Scale/°C for 10-1000 Torr
    Heated:
    0.002% Full Scale/°C
  • Span Temperature Coefficient
    Unheated: 0.04% Reading/°C
    Heated: 0.02% Reading/°C
  • Volume
    6.3 cm3 for 0.5 in. OD tube fitting. Volumes with other fitting available on request
  • Warm-up Time
    2 hours nominal (1 hour stabilization timer for unheated)
  • Overpressure Limit
    45 psia (310 kPa)
  • Materials Exposed to Process Gases
    Inconel and Incoloy nickel alloys (Fittings are made from 300 series stainless steel)
  • Power Requirements
    Unheated:
    +24 VDC ±10% @ 150 mA
    ±15 VDC @ 180 mA
    45°C:
    +24 VDC ±10% @ 560 mA
    ±15 VDC @ 480 mA
    80°C & 100°C:
    +24 VDC ±10% @ 800 mA
    ±15 VDC @ 700 mA
  • Output Relays
    Standard:
    Two solid state relays for "sensor ready" and "device fault" status.
    Optional:
    Two optional internally mounted process pressure trip relays, solid state, independently adjustable through EtherCAT by customer at atmospheric pressure from 0.5% to 100% of Full Scale range.
    Relay hysteresis default setting of 0.5% of Full Scale and is adjustable through EtherCAT.
    Relay capacity of 0.375 amps @ 30 VDC. Relay complies with UL1577 requirements.
  • Indicators
    Multicolor status LED and two (2) red/green LEDs for EtherCAT communications status
  • Compliance
    EU27: CE
    United Kingdom: UKCA
    US: FCC 15B
    Canada: CAN ICES-3(B)/NMB-3(B)
    Australia: AS CISPR11
    South Korea: KC
    Japan: JIS C 61326-1
    Taiwan: CNS 13803
    EtherCAT: ETG.5003.2080 S (R) V1.30n Vacuum Pressure Gauge
    When connected to a properly shielded cable, grounded at both ends.

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