The 649B upstream absolute pressure controller contains a Baratron® capacitance manometer, mass flow meter, normally-closed proportioning control valve, and closed-loop control electronics. The 649 controls absolute pressure. The patented mass flow sensor provides exceptional zero stability and accuracy of flow measurement. Full Scale ranges from 10 sccm to 5000 sccm nitrogen equivalent are available.
The following options are available for 649B Pressure Controllers with Integral Baratron® Manometer and Mass Flow Meter
Ordering Code Example: 649B00413T12C2VR
Configuration Option | Option Code |
---|---|
649B Pressure Controller with MFM |
649B |
Gas |
|
Helium (He) | 001 |
Argon (Ar) | 004 |
Hydrogen (H |
007 |
Nitrogen (N |
013 |
Pressure Range Full Scale |
|
10 Torr | 11T |
20 Torr | 21T |
50 Torr | 51T |
100 Torr | 12T |
1000 Torr | 13T |
Full Scale Flow Rate |
|
10 sccm | 11C |
20 sccm | 21C |
50 sccm | 51C |
100 sccm | 12C |
200 sccm | 22C |
500 sccm | 52C |
1000 sccm | 13C |
2000 sccm | 23C |
5000 sccm | 53C |
Orifice Size |
|
A (50 sccm) | A |
#1 (200 sccm) | 1 |
#2 (1000 sccm) | 2 |
#3 (5000 sccm) | 3 |
Plug Material |
|
Viton | V |
Kalrez | D |
Metal | M |
Kel-F | F |
Fittings (compatible with) |
|
Swagelok 4 VCR male | R |
Swagelok 8 VCR male | T |
The 649 is powered by ±15 VDC at only 300 mA. The default pressure output and input control signals are 0-10 VDC. Two trip points are included in the 649, with LED status indicators, for use as simple on/off process limits. The 649’s control loop tuning parameters are preset for typical installation conditions, but are field adjustable for different conditions and optimum performance. The Proportional and Integral Term adjustments are simple rotary switches, providing a wide dynamic control range.
In the 649B, a pressure transducer monitors the pressure to be controlled at the downstream end of the controller. Actual pressure is compared in the electronics to the pressure set point signal. An appropriate signal is then generated to adjust the proportioning control valve to bring actual pressure into agreement with the desired set point. The internal control valve can be specified with one of four orifices allowing pressure control in systems with Full Scale flows from 10 sccm to 5 slm.