179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters
Model: 179C
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters
Model: 179C
Overview
Overview
The 179C is an all-metal mass flow meter (MFM) designed to measure the flow of gases in a wide variety of applications. 179C Mass-Flo® meters are available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm. The 179C is a direct form-fit-function replacement for the most common MFMs on the market today. The standard 3-inch footprint enables the 179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type "D" connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 179C is compatible with mass flow controller (MFC) power supply and display electronics from MKS or other manufacturers.
Technical Specs
- TypeMass Flow Meter
- Full Scale Flow Range10 - 20,000 sccm (N2 equivalent)
- Fitting TypeComparable to Swagelok® 4 VCR®, Swagelok 4 VCO®, 0.25 in. Swagelok®
- Flow Input Output SignalCE
- Maximum Inlet Pressure500 psig
- Normal Operating Pressure Differential10 Torr
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature0 - 50°C
- Wetted Materials316L stainless steel
- External Leak Integrity<1 x 10-9
- DeviceNet ConnectorAnalog, 9-pin or 15-pin type "D" (The 15-pin type "D" connector is electronically compatible with other MKS flow Meters.)
- DeviceNet Input Power Required0 - 5 VDC into >10 kOhm
- Typical Current Required at Steady State±15 VDC (±5%) @ 150 mA
- Digital I/O Level of Filtering±15 VDC (±5%) @ 50 mA
- Valve State<0.02% of Reading/psi
Technical Specs
- TypeMass Flow Meter
- Full Scale Flow Range10 - 20,000 sccm (N2 equivalent)
- Fitting TypeComparable to Swagelok® 4 VCR®, Swagelok 4 VCO®, 0.25 in. Swagelok®
- Flow Input Output SignalCE
- Maximum Inlet Pressure500 psig
- Normal Operating Pressure Differential10 Torr
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature0 - 50°C
- Wetted Materials316L stainless steel
- External Leak Integrity<1 x 10-9
- DeviceNet ConnectorAnalog, 9-pin or 15-pin type "D" (The 15-pin type "D" connector is electronically compatible with other MKS flow Meters.)
- DeviceNet Input Power Required0 - 5 VDC into >10 kOhm
- Typical Current Required at Steady State±15 VDC (±5%) @ 150 mA
- Digital I/O Level of Filtering±15 VDC (±5%) @ 50 mA
- Valve State<0.02% of Reading/psi
Resources & Downloads
Drawings & CADs
179 Dimensional Drawing(49.3 kB, PDF)