Mass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal
Model: 179C01321CR3BM
Mass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal
Mass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal
Model: 179C01321CR3BM
Overview
Overview
The 179C01321CR3BM is a general purpose mass flow meter with a metal seal, rated for 20 sccm Full Scale (N2), with a 4VCR male fitting and 15-Pin type D connector. It is designed to measure the flow of gases in a wide variety of applications. It provides fast, repeatable flow metering and is a direct form-fit-function replacement for the most common MFMs on the market today.
Technical Specs
-
TypeMass Flow Meter
-
Calibration GasN2Â (or equivalent)
-
Full Scale Flow Range20 sccm
-
Fitting Type4 VCR male
-
Analog I/O Connector15-pin D-sub
-
Seal MaterialMetal
-
Maximum Inlet Pressure500 psig
-
Normal Operating Pressure Differential10 Torr
-
Typical Accuracy±1.0% of Full Scale
-
Repeatability±0.2% of Full Scale
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale/°C
-
Span Temperature Coefficient<0.08% of Reading/°C
-
Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
-
Operating Temperature0 - 50°C
-
Wetted Materials316L stainless steel
-
External Leak Integrity<1 x 10-9
-
ComplianceCE
-
Typical Current Required at Steady State±15 VDC (±5%) @ 150 mA
-
Digital I/O Level of Filtering±15 VDC (±5%) @ 50 mA
-
Valve State<0.02% of Reading/psi
Resources & Downloads
Literature
- 179C All-Metal Mass Flo® Mass Flow Meter, 10 sccm - 20 slm (231.2 kB, PDF)
Mass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal
Ultra-High Velocity