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Compare Description Drawings, CAD & Specs Avail. Price
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01311CR3BMMass Flow Meter, 10 sccm, 4 VCR Male, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01311CS3BMMass Flow Meter, 10 sccm, 0.25 in. Tube, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01312CR3BMMass Flow Meter, 100 sccm, 4 VCR Male, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01312CS3BMMass Flow Meter, 100 sccm, 0.25 in. Tube, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01313CR3BMMass Flow Meter, 1000 sccm, 4 VCR Male, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01313CS3BMMass Flow Meter, 1000 sccm, 0.25 in. Tube, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01314CR3BMMass Flow Meter, 10,000 sccm, 4 VCR Male, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01314CS3BMMass Flow Meter, 10,000 sccm, 0.25 in. Tube, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01321CR3BMMass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal
5 Weeks
$1,217
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters179C01321CS3BMMass Flow Meter, 20 sccm, 0.25 in. Tube, DB15, Metal Seal
5 Weeks
$1,217
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Configuration Options

Please see the 179C datasheet for product options.

Description
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters

179C

Mass Flow Meter, Metal Seal, 10 - 20,000 sccm

Specifications

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
  • Fitting Type
    Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
  • Analog I/O Connector
    9-pin or 15-pin Type "D"
  • Maximum Inlet Pressure
    500 psig
  • Normal Operating Pressure Differential
    10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    2 minutes
  • Operating Temperature
    0° to 50°C
  • Power Requirements
    ±15 VDC (150 mA start-up, 50 mA steady-state)
  • Wetted Materials
    316L S.S.
  • External Leak Integrity
    < 1 x 10-9
  • Compliance
    CE

Features

Direct Form-Fit-Function Replacement

The 179C is a direct form-fit-function replacement for the most common MFM’s on the market today. The standard 3-inch footprint enables the 179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 179C is compatible with mass flow controller (MFC) power supply and display electronics from MKS or other manufacturers.

Performance and Reliability

Performance and reliability have been designed into the 179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing, which includes humidity soak and temperature cycling. The 179C MFM also complies with European CE Mark requirements. Zero and span drift are minimal with MKS’ new patented sensor, as shown by the graph below. As a statement of our confidence in the performance of the 179C, it carries a two-year warranty

Accessories

Compare Description Drawings, CAD & Specs Avail. Price
CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft.
15 Weeks
$93
CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.
In Stock
$137
CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.
In Stock
$179
wa01220-01 mass flow controller cable100016744Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.
In Stock
$104
100019087Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.
10 Weeks
$117
100016745Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.
In Stock
$160
100016746Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.
8 Weeks
$276
RCBDMFC-1-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.
8 Weeks
$158
100019089Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.
1 Week
$511
100019088Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.
8 Weeks
$186
RCBDMFC-3-10Cable, Mass Flow Controller, RoHS, DB9, 10 ft.
8 Weeks
$222
RCBDMFC-4-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.
8 Weeks
$244
RCB147-7-10Mass Flow Meter Cable, PR4000 Controller to 20-pin Card Edge Meters, 10 ft.
Contact Us
RCB147-12-10Mass Flow Meter Cable, PR4000 Controller to DB9 Mass Flow Meters, 10 ft.
Contact Us
RCB147-1-10Mass Flow Meter Cable, PR4000 Controller to DB15 Mass Flow Meters, 10 ft.
8 Weeks
$294

Resources

Literature

Manuals

Drawings & CADs

Application Notes

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