Configuration Options

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Description
GM50A-MFM Mass Flow Meter, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.45 in. Wide
GM51A-MFM Mass Flow Meter, Multi-gas, Multi-range, Metal-sealed, 5 sccm-50 slm, 1.25 in. Wide

Specifications

  • Type
    Mass Flow Meter (MFM)
  • Full Scale Flow Range
    5-50000 sccm (N2 equivalent)
  • Measurement Ranges
    0.1% to 100% of Full Scale (range on mech.)
  • Fitting Type
    Swagelok® 4 VCR® male, 0.25 in.
    Swagelok compression seal, surface mount,
    Swagelok 8 VCR male
    0.125 in. Swagelok
    0.5 in. Swagelok
    6 mm Swagelok
    8 mm Swagelok
    KF16
    0.375 in. Swagelok
    12mm Swagelok
    2 VCR male
  • Flow Input Output Signal
    Voltage (0 to 5 VDC)
    Current (4 to 20 mA)
  • Analog Connector
    15 pin Type D male
    9 pin Type D male
    15 pin Type D male
  • Maximum Inlet Pressure
    500 psi
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    30 minutes
    (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Wetted Materials
    316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
  • Surface Finish
    16μ inch average Ra
  • Power Requirements
    +15 to +24 VDC @ (<2 watts)
  • Weight
    <2.5 lbs (1.1 kg)
  • Compliance
    CE

Features

Communication Options/Specifications

Digital I/O DeviceNet™ RS485 Profibus® EtherCAT® PROFINET®
Input Power Required +11 to +25 VDC per (<2 watts) +15 to +24 VDC (<2 watts) +15 to +24 VDC (<2 watts) +24 VDC (<3 watts) +24 VDC (<3 watts)
Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power)
9 pin Type D female (comm.)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default)
(programmable over network)		 No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch
Comm. Rate(s) 125 Kbps; 250 Kbps; 500 Kbps 9.6 Kbps; 19.2 Kbps 38.4 Kbps 9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A
Network Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A
Visual Indicators LED Network (green/red)
LED Module (green/red)		 LED Comm (yellow)
LED Error (red)		 LED Comm (green/red)
LED Error (green/red)		 LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)		 LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)
Compliance CE CE CE CE CE

Multi-gas/Multi-range Capable

The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.

Resources

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