Mass Flow Meter, 200 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal
Model: GM50A013202RB3020
Mass Flow Meter, 200 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal
Model: GM50A013202RB3020
Overview
Overview
The GM50A013202RB3020 Mass Flow Meter, 200 sccm, with 4 VCR male fitting, a DB15 connector, and a metal seal.
Technical Specs
- TypeMass Flow Meter
- Measurement Ranges200 sccm
- Calibration GasNitrogen
- Fitting TypeSwagelok 4 VCR male
- Analog ConnectorAnalog 0-5 VDC (15 pin D connector)
- Maximum Inlet Pressure500 psi
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of Reading
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10-50°C
- Storage Humidity0-95% relative humidity, non-condensing
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
- Surface Finish16µ inch average Ra
- Weight<2.5 lbs (1.1 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Meter
- Measurement Ranges200 sccm
- Calibration GasNitrogen
- Fitting TypeSwagelok 4 VCR male
- Analog ConnectorAnalog 0-5 VDC (15 pin D connector)
- Maximum Inlet Pressure500 psi
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of Reading
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10-50°C
- Storage Humidity0-95% relative humidity, non-condensing
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
- Surface Finish16µ inch average Ra
- Weight<2.5 lbs (1.1 kg)
- ComplianceCE