1. Products
  2. Mass Flow Controllers & Meters
  3. Mass Flow Meters
  4. G-Series Mass Flow Meters
  5. GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters
  6. GM50A013202RB3020

Mass Flow Meter, 200 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal

Model: GM50A013202RB3020

Mass Flow Meter, 200 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal

Mass Flow Meter, 200 sccm, 4 VCR male, 0-5 VDC, DB15, Metal Seal

Model: GM50A013202RB3020

Technical Specs

  • Type
    Mass Flow Meter
  • Measurement Ranges
    200 sccm
  • Calibration Gas
    Nitrogen
  • Fitting Type
    Swagelok 4 VCR male
  • Analog Connector
    Analog 0-5 VDC (15 pin D connector)
  • Maximum Inlet Pressure
    500 psi
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Warm-up Time
    30 minutes (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Wetted Materials
    316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
  • Surface Finish
    16µ inch average Ra
  • Weight
    <2.5 lbs (1.1 kg)
  • Compliance
    CE

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