Configuration Options

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Description
GE250A-MFM Mass Flow Controller, Multi-gas, Multi-range, Elastomer-sealed, 100-250 slm

Specifications

  • Type
    Mass Flow Meter (MFM)
  • Full Scale Flow Range
    100-250 slm (N2 equivalent)
  • Measurement Ranges
    0.1% to 100 % of Full Scale (range on mech.)
  • Fitting Type
    Compatible with:
    12 mm Swagelok
    0.375 in. tube compression
    0.5 in. tube compression
    0.5 in. tube compression long
    0.5 in. NPT female
    8 VCR Male
    8 VCO Male
    8 VCR Male long
    8 VCO Male long
    W-Seal
  • Seal Material
    Viton®
    Buna
    Neoprene®
    EPDM
    Viton (USP Class VI Compliant)
  • Flow Input Output Signal
    Voltage (0 to 5 VDC)
    Current (4 to 20 mA)
  • Connector
    Profibus (1179B Compatible)
    Profibus (1480 Compatible)
    RS485
    DeviceNet
    EtherCAT
    PROFINET
    15 pin D (Analog 0 to 5 VDC I/O)
    15 pin D (4 to 20 mA I/O)
  • Maximum Inlet Pressure
    150 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading
  • Repeatability
    ±0.5% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.03% of Reading/psi or less
  • Warm-up Time
    1 hour
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • Storage Temperature
    -20° to 65°C (-4° to 149° F)
  • External Leak Integrity
    <1 x 10-9 (scc/sec He)
  • Wetted Materials
    316L S.S.
  • Surface Finish
    16μ inch average Ra
  • Power Requirements
    +15 to +24 VDC @ (<2 watts)
  • Weight
    <3.4 lbs (1.54 kg)
  • Compliance
    CE

Features

Communication Options/Specifications

Digital I/O DeviceNet™ RS485 Profibus® EtherCAT® PROFINET®
Input Power Required +11 to +25 VDC per (<2 watts) +15 to +24 VDC (<2 watts) +15 to +24 VDC (<2 watts) +24 VDC (<3 watts) +24 VDC (<3 watts)
Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power)
9 pin Type D female (comm.)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default)
(programmable over network)		 No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch
Comm. Rate(s) 125 Kbps; 250 Kbps; 500 Kbps 9.6 Kbps; 19.2 Kbps 38.4 Kbps 9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A
Network Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A
Visual Indicators LED Network (green/red)
LED Module (green/red)		 LED Comm (yellow)
LED Error (red)		 LED Comm (green/red)
LED Error (green/red)		 LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)		 LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)
Compliance CE CE CE CE CE

Multi-gas/Multi-range Capable

The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.

Resources

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