CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter
Model: CMA10B-MFM
CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter
Model: CMA10B-MFM
Overview
Overview
The CMA10B Mass Flow Meter (MFM) is a compact, fast response, model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 15 sccm to 14000 sccm, N2 with flow measurement from as low as 0.1% of Full Scale up to 100% of Full Scale. Communication interfaces are either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP). The required power supply voltage is 24 VDC nominal.
Technical Specs
- TypeMass Flow Meter
- Full Scale Flow Range500 sccm
- Proof Pressure232 psi/16 bar
- Burst Pressure1000 psi/70 bar
- Measurement Range±0.8% of Reading
- Typical Accuracy±0.8% of Reading
- Zero Temperature Coefficient≤0.005% of Full Scale/°C
- Span Temperature Coefficient≤0.06% of Reading/°C
- Warm-up Time≤1 min
- Fitting Type0.25 in. Compression
- ConnectorPROFINET
- Wetted MaterialsAluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
- Seal MaterialViton
- ComplianceCE
Technical Specs
- TypeMass Flow Meter
- Full Scale Flow Range500 sccm
- Proof Pressure232 psi/16 bar
- Burst Pressure1000 psi/70 bar
- Measurement Range±0.8% of Reading
- Typical Accuracy±0.8% of Reading
- Zero Temperature Coefficient≤0.005% of Full Scale/°C
- Span Temperature Coefficient≤0.06% of Reading/°C
- Warm-up Time≤1 min
- Fitting Type0.25 in. Compression
- ConnectorPROFINET
- Wetted MaterialsAluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
- Seal MaterialViton
- ComplianceCE