CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter

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Overview

The C-Series CMA10B Mass Flow Meter (MFM) is a compact, fast response, model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 15 sccm to 14000 sccm, N2 with flow measurement from as low as 0.1% of Full Scale up to 100% of Full Scale. Communication interfaces are either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP). The required power supply voltage is 24 VDC nominal.

Ultrafast response time of <100 msec
Measurement range from 0.1-100% of Full Scale
Embedded web browser for setup and diagnostics

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Products

Configuration Options

The following options are available for C-Series Mass Flow Meters
Ordering Code Example: CMA10B013102RCV3010

Configuration Option	Option Code
Model
CMA10B	CMA10B
Gas (Per Semi Standard E52-0703)
He	001
Ar	004
Air	008
N₂	013
O₂	015
SF₆	110
For other gases, contact MKS Instruments Flow range is based on gas - see the Selection Table below.
Flow Range Full Scale
50 sccm	501
100 sccm	102
200 sccm	202
500 sccm	502
1000 sccm	103
2000 sccm	203
5000 sccm	503
10000 sccm	104
Fittings (compatible with)
4 VCR Male	R
0.25 in. Compression	S
Downmount O-ring Seal	C
For other options, contact MKS Instruments
Connector
Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary	R
Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary	C
Modbus TCP	M
PROFINET	9
Seal Materials
Viton	V
Valve/Device Type
No Valve/Mass Flow Meter (Same length as MFC)	3
No Valve/Mass Flow Meter (Reduced Length) Reduced length not available for W-Seal or Downmount O-ring Seal fittings	4
Reserved (future use)
Standard Build	0
Firmware
RS485/Analog Dual I/O	10
Modbus TCP	10
PROFINET	10

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	Description
	CMA10B-MFM Mass Flow Meter, Compact, Ultrafast

Specifications

Type

Mass Flow Meter
Full Scale Flow Range

15-14,000 sccm (N2)
Maximum Inlet Pressure

80 psig
Proof Pressure

232 psi/16 bar
Burst Pressure

1000 psi/70 bar
Measurement Range

0.1-100% of Full Scale
Typical Accuracy

±0.8% of Reading
Repeatability

±0.2% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

≤0.005% of Full Scale/°C
Span Temperature Coefficient

≤0.06% of Reading/°C
Pressure Coefficient

<0.025% of Reading/psi
Warm-up Time

≤1 min

Operating Temperature

10-50°C (32-122°F)
Storage Humidity

0-95% relative humidity, non-condensing
Storage Temperature

0-60°C (32-140°F)
Fitting Type

Compatible with:
Swagelok® 4 VCR® male
surface mount (o-ring)
0.25 in. Swagelok compression
External Leak Integrity

<1 x 10^-09
Wetted Materials

Standard: Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
Set Point Command Signal

0-5 VDC (0-10 VDC, optional)
Power Requirements

24 VDC @ (±10%), <2 watts
Flow Input Output Signal

0-5 VDC (0-10 VDC, optional)
Analog I/O Connector

9-pin Type D
Weight

0.45 lbs (204 grams) (VCR)
Compliance

CE (Electrical Analog I/O)

Specifications

Type

Mass Flow Meter
Full Scale Flow Range

15-14,000 sccm (N2)
Maximum Inlet Pressure

80 psig
Proof Pressure

232 psi/16 bar
Burst Pressure

1000 psi/70 bar
Measurement Range

0.1-100% of Full Scale
Typical Accuracy

±0.8% of Reading
Repeatability

±0.2% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

≤0.005% of Full Scale/°C
Span Temperature Coefficient

≤0.06% of Reading/°C
Pressure Coefficient

<0.025% of Reading/psi
Warm-up Time

≤1 min

Operating Temperature

10-50°C (32-122°F)
Storage Humidity

0-95% relative humidity, non-condensing
Storage Temperature

0-60°C (32-140°F)
Fitting Type

Compatible with:
Swagelok® 4 VCR® male
surface mount (o-ring)
0.25 in. Swagelok compression
External Leak Integrity

<1 x 10^-09
Wetted Materials

Standard: Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
Set Point Command Signal

0-5 VDC (0-10 VDC, optional)
Power Requirements

24 VDC @ (±10%), <2 watts
Flow Input Output Signal

0-5 VDC (0-10 VDC, optional)
Analog I/O Connector

9-pin Type D
Weight

0.45 lbs (204 grams) (VCR)
Compliance

CE (Electrical Analog I/O)

Features

C-Series Communication Options

Digital I/O	RS485	PROFINET®	Modbus
Input Power Required	24 VDC @ (±10%), <4 watts	+24 VDC (<5 watts)	+24 VDC (<5 watts)
Connector	9 pin Type D male (power and comm.)	2 x RJ-45 (comm.) male, M8 male, 5 pin (power)	1 x RJ-45 (comm.) male,DC power plug
Data Rate Switch/Selection	No switch Set data rate via RS485	MFC: No switch MFM: N/A	N/A
Comm. Rate(s)	9.6 Kbps 19.2 Kbps 38.4 Kbps	MFC: 100 Mbps MFM: N/A	N/A
MAC ID Switches/Addresses	Set address over RS485 Station Addresses 0,0 to 9,9	N/A	N/A
Network Size	Up to 32 nodes	N/A	N/A
Visual Indicators	LED Power LED Run (green)	LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red)	LED Module LED Network
Compliance	CE	CE	CE

CMA10B Selection Guide

C-Series mass flow controllers and meters are selected based on the gas and range desired. Use this table to determine the best model for your application:

		CMA10B
*Gas SEMI#*	*Gas Symbol*	*Minimum Full Scale*	*Maximum Full Scale*
1	He	23	16000
4	Ar	40	14000
8	Air	15	14000
13	N2	15	14000
15	O2	14	13000
110	SF6	7	4500

Features

C-Series Communication Options

Digital I/O	RS485	PROFINET®	Modbus
Input Power Required	24 VDC @ (±10%), <4 watts	+24 VDC (<5 watts)	+24 VDC (<5 watts)
Connector	9 pin Type D male (power and comm.)	2 x RJ-45 (comm.) male, M8 male, 5 pin (power)	1 x RJ-45 (comm.) male,DC power plug
Data Rate Switch/Selection	No switch Set data rate via RS485	MFC: No switch MFM: N/A	N/A
Comm. Rate(s)	9.6 Kbps 19.2 Kbps 38.4 Kbps	MFC: 100 Mbps MFM: N/A	N/A
MAC ID Switches/Addresses	Set address over RS485 Station Addresses 0,0 to 9,9	N/A	N/A
Network Size	Up to 32 nodes	N/A	N/A
Visual Indicators	LED Power LED Run (green)	LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red)	LED Module LED Network
Compliance	CE	CE	CE

CMA10B Selection Guide

C-Series mass flow controllers and meters are selected based on the gas and range desired. Use this table to determine the best model for your application:

		CMA10B
*Gas SEMI#*	*Gas Symbol*	*Minimum Full Scale*	*Maximum Full Scale*
1	He	23	16000
4	Ar	40	14000
8	Air	15	14000
13	N2	15	14000
15	O2	14	13000
110	SF6	7	4500