390 Micro-Ion® ATM Vacuum Transducers
Model: 390
390 Micro-Ion® ATM Vacuum Transducers
Model: 390
Overview
Overview
The Granville-Phillips® 390 Micro-Ion® ATM Vacuum Gauge Module combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space. The 390 Micro-Ion® ATM Vacuum Gauge Module's full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet™ digital interfaces. RS-485 and DeviceNet™ versions have up to three optional set point relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.
Technical Specs
- Absolute Measurement Range1.0 x 10-9 to 760 Torr
- Differential Measurement Range-750 to +250 Torr
- Digital CommunicationDeviceNet
- TypeVacuum Gauge Module
- DisplayGraphics LCD
- InterfaceDeviceNet
- Relays3
- Fitting Type8 VCR male
- Operating Temperature10 - 40°C (50° to 104°F), non-condensing
- Maximum Bakeout Temperature105°C (221°F) with electronics removed
- Storage Temperature-40 - 70°C (-40 - 158°F)
- Analog Output0.5-7.0 VDC (0.5 VDC per Decade Logarithmic)
- Relay Contact RatingMaximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
- Power RequirementsRS485/Analog: 24 VDC +10% to -15%, 1 Amp, 22 Watts nominal, DeviceNet: 24 VDC (11 - 26.4 VDC) at 0.2A nominal
- AccuracyAbsolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.3
- Repeatability1x10-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
- Internal Volume10.8 cm3 (0.65 in.3)
- Exposed Materials304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
- Electronic Casing and FlangeAluminum Extrusion with Powder-coat
- ComplianceCE
- FilamentTungsten
- Response Time<25 mseconds
- ConnectorsRS485/Analog: 15-pin subminiature-D male, DeviceNet: 5-pin micro connector
- UnitsPascal
- RS485 CommunicationsASCII: No parity, one stop bit
- RS485 Address0 - 63, selected by using address switch and RS485 command
- RS485 Baud Rates1200, 2400, 4800, 9600, 19200 (default), 38400
- RS485 Interface2-wire, half-duplex
- DeviceNet MessagingPolled I/O and explicit
- DeviceNet Address0 - 63, selected by using data rate switch
- DeviceNet Baud Rates125, 250 or 500 kbaud, switch selectable
- X-ray Limit<3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
- Emission CurrentAutoranging
- DegasElectron bombardment, 3 Watts for 1 minute/filament
- Automatic Ionization Gauge On Setting2 x 10-2 Torr, 2.66 x 10-2 mbar, 2.66 Pa, with decreasing pressure
- Automatic Switch to High Emission Setting5 x 10-6 Torr, 6.66 x 10-6 mbar, 6.66 x 10-4 Pa, with decreasing pressure
- Automatic Ionization Gauge Off Setting3 x 10-2 Torr, 3.99 x 10-2 mbar, 3.99 Pa, with increasing pressure
- Automatic Switch to Low Emission Setting1 x 10-5 Torr, 1.33 x 10-5 mbar, 1.33 x 10-3 Pa, with increasing pressure
- Heat-loss Sensor WiresGold-plated tungsten
- LED IndicatorModule status
- Maximum Inrush CurrentRS485/Analog: 2 Amps, 48 Watts, for 0.5 seconds, DeviceNet: 0.25A
Technical Specs
- Absolute Measurement Range1.0 x 10-9 to 760 Torr
- Differential Measurement Range-750 to +250 Torr
- Digital CommunicationDeviceNet
- TypeVacuum Gauge Module
- DisplayGraphics LCD
- InterfaceDeviceNet
- Relays3
- Fitting Type8 VCR male
- Operating Temperature10 - 40°C (50° to 104°F), non-condensing
- Maximum Bakeout Temperature105°C (221°F) with electronics removed
- Storage Temperature-40 - 70°C (-40 - 158°F)
- Analog Output0.5-7.0 VDC (0.5 VDC per Decade Logarithmic)
- Relay Contact RatingMaximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
- Power RequirementsRS485/Analog: 24 VDC +10% to -15%, 1 Amp, 22 Watts nominal, DeviceNet: 24 VDC (11 - 26.4 VDC) at 0.2A nominal
- AccuracyAbsolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.3
- Repeatability1x10-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
- Internal Volume10.8 cm3 (0.65 in.3)
- Exposed Materials304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
- Electronic Casing and FlangeAluminum Extrusion with Powder-coat
- ComplianceCE
- FilamentTungsten
- Response Time<25 mseconds
- ConnectorsRS485/Analog: 15-pin subminiature-D male, DeviceNet: 5-pin micro connector
- UnitsPascal
- RS485 CommunicationsASCII: No parity, one stop bit
- RS485 Address0 - 63, selected by using address switch and RS485 command
- RS485 Baud Rates1200, 2400, 4800, 9600, 19200 (default), 38400
- RS485 Interface2-wire, half-duplex
- DeviceNet MessagingPolled I/O and explicit
- DeviceNet Address0 - 63, selected by using data rate switch
- DeviceNet Baud Rates125, 250 or 500 kbaud, switch selectable
- X-ray Limit<3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
- Emission CurrentAutoranging
- DegasElectron bombardment, 3 Watts for 1 minute/filament
- Automatic Ionization Gauge On Setting2 x 10-2 Torr, 2.66 x 10-2 mbar, 2.66 Pa, with decreasing pressure
- Automatic Switch to High Emission Setting5 x 10-6 Torr, 6.66 x 10-6 mbar, 6.66 x 10-4 Pa, with decreasing pressure
- Automatic Ionization Gauge Off Setting3 x 10-2 Torr, 3.99 x 10-2 mbar, 3.99 Pa, with increasing pressure
- Automatic Switch to Low Emission Setting1 x 10-5 Torr, 1.33 x 10-5 mbar, 1.33 x 10-3 Pa, with increasing pressure
- Heat-loss Sensor WiresGold-plated tungsten
- LED IndicatorModule status
- Maximum Inrush CurrentRS485/Analog: 2 Amps, 48 Watts, for 0.5 seconds, DeviceNet: 0.25A