The 390710-2-YG-T Micro-Ion® ATM Vacuum Gauge Module features 1x10-9 Torr to Atmosphere pressure measurement, a 2.75 in. (NW35-CF) ConFlat-type fitting, and EtherCAT communications. Two set point control relays are included to simplify process control functions. It combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.
Maximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
Power Requirements
24 VDC +10% to -15%, 1 Amp, 22 Watts nominal
Accuracy
Absolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
Repeatability
1x10-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
<3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
Emission Current
Autoranging
Degas
Electron bombardment, 3 Watts for 1 minute/filament
Automatic Ionization Gauge On Setting
2 x 10-2 Torr, 2.66 x 10-2 mbar, 2.66 Pa, with decreasing pressure
Automatic Switch to High Emission Setting
5 x 10-6 Torr, 6.66 x 10-6 mbar, 6.66 x 10-4 Pa, with decreasing pressure
Automatic Ionization Gauge Off Setting
3 x 10-2 Torr, 3.99 x 10-2 mbar, 3.99 Pa, with increasing pressure
Automatic Switch to Low Emission Setting
1 x 10-5 Torr, 1.33 x 10-5 mbar, 1.33 x 10-3 Pa, with increasing pressure
Heat-loss Sensor Wires
Gold-plated tungsten
LED Indicator
Module status
Maximum Inrush Current
2 Amps, 48 Watts, for 0.5 seconds
Technical Specs
Absolute Measurement Range
1.0 x 10-9 to 760 Torr
Differential Measurement Range
-750 to +250 Torr
Digital Communication
EtherCAT
Type
Vacuum Gauge Module
Display
No
Interface
EtherCAT
Relays
2
Fitting Type
2.75 in. CF
Operating Temperature
10 - 40°C (50° to 104°F), non-condensing
Maximum Bakeout Temperature
105°C (221°F) with electronics removed
Storage Temperature
-40 - 70°C (-40 - 158°F)
Relay Contact Rating
Maximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
Power Requirements
24 VDC +10% to -15%, 1 Amp, 22 Watts nominal
Accuracy
Absolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
Repeatability
1x10-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
Additional CAD file downloads are not available for this product.
390710-2-YG-T - Drawings
Additional drawings are not available for this product.
390710-2-YG-T
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Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, EtherCAT, 2 Relays